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GB/T 41072-2021Surface chemical analysis—Electron spectroscopies—Guidelines for ultraviolet photoelectron spectroscopy analysis (English PDF)

表面化学分析 电子能谱 紫外光电子能谱分析指南

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Issued by

SAMR; SAC

Level / Type

National · Recommended

Issue date

December 31, 2021

Implementation date

April 1, 2022

Scope

GB/T 41072-2021 is the English-translated version of 表面化学分析 电子能谱 紫外光电子能谱分析指南.

GB/T 41072-2021 is a Chinese national guide for operators who carry out ultraviolet photoelectron spectroscopy (UPS) on the surfaces of solid materials, using X-ray photoelectron spectrometers fitted with a vacuum ultraviolet light source.

It explains the energy level relationships behind the technique, the structure of the instrument and the test process, then covers sample preparation by material type, morphology, mounting and handling.

It goes on to instrument checks, calibration of the energy scale and instrument settings, the evaluation of sample charging from the C 1s XPS spectrum, full and narrow scans with data collection and analysis, and what the test report should contain.

The symbols it defines include work-function related quantities such as the Fermi level, vacuum level, valence band maximum and secondary electron cutoff. It was issued on 31 December 2021 and has applied since 1 April 2022.

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Document preview — GB/T 41072-2021

National Standard of the People's Republic of China

ICS
71.040.40
Classification
G 04

Issued by: State Administration for Market Regulation; Standardization Administration of the PRC

Contents

  • Preface
  • Introduction
  • 1 Scope
  • 2 Normative references
  • 3 Terms and Definitions
  • 4 Symbols and Abbreviations
  • 5 Overview
  • 5.1 Energy level relationship
  • 5.2 Instrument structure
  • 5.3 Test process
  • 6 Sample preparation
  • 6.1 Overview
  • 6.2 Material Type
  • 6.3 Specimen morphology
  • 6.4 Sample installation
  • 6.5 Sample Handling
  • 7 Instrument Calibration
  • 7.1 Overview
  • 7.2 Instrument Check
  • 7.3 Calibration of the instrument energy scale
  • 7.4 Instrument Settings
  • 8 Sample charge evaluation
  • 8.1 Collecting the XPS spectrum of C1s
  • 8.2 Charge Assessment
  • 9 Full Scan and Narrow Scan
  • 9.1 Overview
  • 9.2 Data collection
  • 9.3 Data Analysis
  • 10 Test report
  • Appendix A (Informative) Example of Surface Scanning Ion Beam Etching of Au Reference Material
  • Appendix B (Informative) UV Photon Energy under Different Excitation Light Sources
  • Reference

Foreword

This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for Standardization Work Part 1. Structure and Drafting Rules of Standardization Documents" drafted.

Introduction

Photoelectron spectroscopy is one of the most important and effective analytical methods for studying the surface of solid materials. Equipped with X-ray Photoelectron Spectroscopy Ultraviolet photoelectron spectroscopy on the instrument can be used to obtain the energy distribution information of valence electrons in solid materials, which is an important method to study the work function and valence band of the material surface.

An efficient method for the structure (density of states), the energy resolution of which can reach about 100 meV, in the fields of solid state physics, surface science and materials science, etc. have important applications. As the research on semiconductor devices and photocatalytic materials becomes more and more extensive, their preparation and performance regulation require the valence electrons of the materials. The band structure can be accurately measured.

1 Scope

This document provides guidance for instrument operators to perform UV photoelectron spectroscopy analysis of solid material surfaces, including sample handling, spectrometer calibration Calibration and setup, spectral acquisition, and final reporting.

This document applies to the analysis of typical samples by operators of X-ray photoelectron spectrometers equipped with a vacuum ultraviolet light source.

2 Normative references

The contents of the following documents constitute essential provisions of this document through normative references in the text. Among them, dated citations documents, only the version corresponding to that date applies to this document; for undated references, the latest edition (including all amendments) applies to this document document.

GB/T 22461-2008 vocabulary of surface chemical analysis

GB/T 22571-2017 Calibration of energy scale of X-ray photoelectron spectrometer for surface chemical analysis

GB/T 27025-2019 General requirements for the competence of testing and calibration laboratories

3 Terms and Definitions

Terms and definitions defined in GB/T 22461-2008 apply to this document.

4 Symbols and Abbreviations

The following symbols and abbreviations apply to this document.

ARPES: angle-resolved photoemission spectroscopy

EA: electron affinity

Eb: photoelectron binding energy

ECBM: bottom of conduction band

Ecutoff: Secondary electron cutoff

EF: Fermi level

Eg: forbidden band width (also called band gap)

EHOMO: HOMO energy level, the highest occupied molecular orbital (highest occupied molecular orbital)

Ek: kinetic energy of photoelectron

ELUMO: LUMO energy level, the lowest unoccupied molecular orbital (lowest unoccupied molecular orbital)

Evac: vacuum level

EVBM: valence band maximum

IP: ionization potential

UPS: Ultraviolet Photoelectron Spectroscopy

hnu: incident photon energy

......
This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 17 pages — is available in the English PDF.

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