GB/T 39516-2020Micro nano standard samples (geometric) (English PDF)
微纳米标准样板（几何量）
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Issued by
SAMR; SAC
Level / Type
National · Recommended
Issue date
November 19, 2020
Implementation date
June 1, 2021
Scope
GB/T 39516-2020 is the English-translated version of 微纳米标准样板（几何量）.
GB/T 39516-2020 specifies the terms and definitions, the types and basic parameters, the requirements, the inspection conditions, the inspection methods and the signs, transportation and storage for micro-nano standard samples for geometric quantities.
Clause 1 states that it applies to micro-nano line spacing standard samples with a line spacing of 0.05 micrometres to 10 micrometres, micro-nano step height standard samples with a step height of 0.01 micrometres to 100 micrometres, nano film thickness standard samples with a film thickness of 2 nm to 1000 nm, and nanowire width standard samples with a line width of 25 nm to 1000 nm.
Clause 2 cites GB/T 17163-2008 and GB/T 25915.1-2010.
Clause 3 takes the terms of GB/T 17163-2008 and adds its own, among them line spacing, defined as periodic scribe lines of micro-nano accuracy and uniformity with a pitch not greater than 10 micrometres, and step height, defined as steps or grooves of micro-nano accuracy and uniformity; it opens with one definition, for a geometric characteristic structure with micro-nano level line spacing, step height, film thickness and line width that can serve as a standard sample for micro-nano measurement, whose term name the draft does not print.
Clause 4 sets out the types and their basic parameters, clause 5 the appearance and the performance parameter requirements, which Tables 1 to 4 give for each of the four kinds of sample, clause 6 the inspection conditions, clause 7 the inspection methods, with one subclause for appearance and one for the performance parameters of each kind of sample, and clause 8 the sign, the transportation, the storage and the product certificate.
Seventeen figures illustrate the definitions, the four kinds of sample and the measurement and assessment locations used in the inspection methods. The standard was proposed by the China Machinery Industry Federation and is under the jurisdiction of the National Standardization Technical Committee for Measuring Instruments (SAC/TC132). It was issued on November 19, 2020 and has applied since June 1, 2021.
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Document preview — GB/T 39516-2020
National Standard of the People's Republic of China
- ICS
- 17.040.30
- Classification
- J 42
Issued by: State Administration for Market Regulation; Standardization Administration of the PRC
Contents
- Preface
- 1 Scope
- 2 Normative references
- 3 Terms and definitions
- 4 Type and basic parameters
- 4.1 Type
- 4.2 Basic parameters
- 5 Requirements
- 5.1 Appearance
- 5.2 Performance parameter requirements
- 6 Inspection condition
- 7 Inspection method
- 7.1 Appearance
- 7.2 Performance parameters of micro-nanowire interval standard sample
- 7.3 Performance parameters of micro-nano step height standard model
- 7.4 Performance parameters of nano-film thickness standard sample
- 7.5 Performance parameters of nanowire width standard model
- 8 Marking, transportation and storage
- 8.1 Sign
- 8.2 Transportation
- 8.3 Storage
- 8.4 Product certificate
Foreword
This standard was drafted in accordance with the rules given in GB/T 1.1-2009.
1 Scope
This standard specifies the terms and definitions, types and basic parameters, requirements, inspection conditions, inspection methods, and Signs, transportation and storage, etc.
This standard is applicable to the standard model of micro-nano wire spacing with line spacing of 0.05µm~10µm, and the step height is 0.01µm~100µm The micro-nano step height standard template, the nano-film thickness standard template with the film thickness of 2nm~1000nm and the line width of 25nm~ 1000nm nanowire width standard model.
2 Normative references
The following documents are indispensable for the application of this document. For dated reference documents, only the dated version applies to this document.
For undated references, the latest version (including all amendments) applies to this document.
GB/T 17163-2008 Basic terminology of geometric quantity measuring instrument terminology
GB/T 25915.1-2010 Clean room and related controlled environment Part 1: Air cleanliness grade
3 Terms and definitions
The following terms and definitions defined in GB/T 17163-2008 apply to this document.
3.1
It has the geometric characteristic structure of micro-nano-level line spacing, step height, film thickness, and line width, which can be used as a standard model for micro-nano measurement.
3.2 Line spacing
Periodic scribe lines with micro-nano-level accuracy and uniformity, and scribe line pitch P not greater than 10µm. Periodically scribe lines on the same side adjacent to each other The distance between the edges or the distance between the centers of adjacent periodic reticle geometric structures characterizes the reticle interval.
Note: The line spacing diagram is shown in Figure 1.
3.3 Step height
Steps or grooves with micro-nano accuracy and uniformity.
......
This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 17 pages — is available in the English PDF.
Referenced standards
Normative references
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