GB/T 39157-2020Classification and definition of the technology readiness levels for targets (English PDF)

GB/T 39157-2020 is the English-translated version of 靶材技术成熟度等级划分及定义.

GB/T 39157-2020 establishes a maturity scale for sputtering target materials. Clause 1 states that the standard specifies the terms and definitions, the classification and the determination rules for the maturity of target materials, and that it applies to the evaluation of target technology maturity.

The body shows that the terms and definitions are carried in clause 2, which defines the target as the cathode part in sputtering deposition technology, whose material is driven off the cathode as molecules, atoms or ions under the impact of positively charged cations and deposited on the anode surface.

The same clause defines technology maturity as the degree to which the technology meets the intended application goals and the technology maturity level as the scale used to measure that degree, a definition rewritten from GB/T 37264-2018, and it defines a technical parameter as relative data obtained for a given object under specified test conditions, generally a performance test report produced during design or production.

It then distinguishes two physical stages of the work: the target sample, a laboratory-stage object made to the design requirements of the target material in order to test main performance, structure and process performance, which carries only part of the characteristics of the finished target; and the target prototype, made in small batches or small-scale preparation at the target engineering stage with the final form in mind, to test the key performance and functions of the target.

The last two definitions set the settings in which that testing is done, the laboratory environment, meaning the laboratory's test and calibration facilities and conditions used to verify technical principles and functions, and the simulated environment, which reproduces the real service environment to verify the key performance of the target material or of its main components.

Both the target sample and the target prototype definitions are rewritten from GB/T 37264-2018.

The standard was proposed by the China Nonferrous Metals Industry Association and falls under the National Technical Committee for Standardization of Nonferrous Metals (SAC/TC243), with new materials and electronic materials companies among the drafting bodies. It was issued on 19 November 2020 and has applied since 1 October 2021.

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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 15 pages — is available in the English PDF.

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