GB/T 34612-2017Measurement method for X-ray double crystal diffraction rocking curve of sapphire crystals (English PDF)

1 Scope

This standard specifies the sapphire crystal X-ray double crystal diffraction rocking curve measurement method.

This standard applies to the measurement of sapphire crystal X-ray double crystal diffraction rocking curve.

2 Normative references

The following documents for the application of this document is essential. For dated references, only the dated version applies to this article

Pieces. For undated references, the latest edition (including all amendments) applies to this document.

GB/T 14264 semiconductor materials terminology

3 Terms and definitions

GB/T 14264 and defined by the following terms and definitions apply to this document.

3.1

chi axis chiaxis

The axis of the tilted sample is formed by the intersection of the diffraction plane formed by the incident X-ray and the diffracted X-ray beam with the sample surface.

3.2

chi angle chiangle

The angle between a sample surface and the sample surface.

3.3

phi angle phiangle

The sample stage rotates about the normal of the sample surface.

3.4

phi scan phiscan

Change the angle phi continuously and record the diffraction intensity measurement mode.

3.5

omega angle omegaangle

The angle between incident X-ray and sample surface.

3.6

omega scan omegascan

Change the omega angle continuously and record the diffraction intensity measurement mode.

4 method summary