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GB/T 34504-2017Measurement method for surface metal contamination on sapphire polished substrate wafer (English PDF)

蓝宝石抛光衬底片表面残留金属元素测量方法

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Issued by

General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China

Level / Type

National · Recommended

Issue date

October 14, 2017

Implementation date

May 1, 2018

Scope

GB/T 34504-2017 is the English-translated version of 蓝宝石抛光衬底片表面残留金属元素测量方法.

GB/T 34504-2017 — This standard specifies the sapphire polishing substrate surface depth of 5nm residual metal elements total reflection X-ray fluorescence spectrometry Test method.

This standard applies to sapphire polishing substrate surface residual, in the periodic table 11 (Na) ~ 92 (U) (remove aluminum and oxygen), and the areal density is between 109 atoms/cm2 and 1015 atoms/cm2.

Other uses Sapphire polishing surface residual the measurement of remaining metal elements can be performed with reference to this standard.

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Document preview — GB/T 34504-2017

National Standard of the People's Republic of China

ICS: 77.040
Classification: H 17

Issued by: General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China

Document data1

Document data

International classification (ICS): 77.040.

Chinese classification (CCS): H17.

Estimated length of the Chinese original: 14,138 words.

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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 9 pages — is available in the English PDF.

Referenced standards

Normative references

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