GB/T 33523.603-2022Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments (English PDF)

Foreword

This document was issued on 30 December 2022 by the State Administration for Market Regulation; Standardization Administration of the PRC and takes effect on 1 April 2023.

It is a GB/T standard: recommended rather than compulsory, but it is the text a Chinese reviewer applies when assessing a submission.

It is classified under ICS 17.040.20, Chinese classification J04.

This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for Standardization Work Part 1.Structure and Drafting Rules for Standardization Documents"

drafting.

This document is part 603 of GB/T 33523 "Geometric Specification for Products (GPS) Surface Structure Area Law". GB/T 33523

The following parts have been published.

--- Part 1.Representation of surface structure;

--- Part 2.Terms, definitions and surface structure parameters;

--- Part 3.Specification operation set;

--- Part 6.Classification of surface structure measurement methods;

--- Part 70.Physical measurement standards;

--- Part 71.Software measurement standards;

--- Part 72.XML file format x3p;

--- Part 601.Nominal characteristics of contact (stylus) instruments;

--- Part 602.Nominal characteristics of non-contact (confocal chromatic aberration probe) instruments;

--- Part 603.Nominal characteristics of non-contact (phase-shift interference microscopy) instruments;

--- Part 604.Nominal characteristics of non-contact (coherent scanning interference) instruments;

--- Part 605.Nominal characteristics of non-contact (point autofocus probe) instruments;

--- Part 606.Nominal characteristics of non-contact (zoom) instruments;

--- Part 701.Calibration and measurement standards for contact (stylus) instruments.

This document is equivalent to ISO 25178-603.2013 "Product Geometric Specifications (GPS) Surface Structure Area Law Part 603

Part. Nominal Characteristics of Non-Contact (Phase Shift Interference Microscopy) Instruments".

This document adds a chapter "Normative References".

Please note that some contents of this document may refer to patents. The issuing agency of this document assumes no responsibility for identifying patents.

This document is proposed and managed by the National Product Geometric Technical Specification Standardization Technical Committee (SAC/TC240).

This document is drafted by. Tsinghua University, Shandong University, Shenzhen Zhongtu Instrument Co., Ltd., Harbin Institute of Technology, China Machinery Manufacturing

Power Promotion Center Co., Ltd., China Institute of Metrology, Guangzhou Institute of Metrology and Testing Technology, China Machine Research Institute of Standard Technology (Beijing)

Ltd.

The main drafters of this document. Wei Haoyun, Yan Peng, Ma Junjie, Liu Jian, Shi Yushu, Dai Kunpeng, Zhu Yue.

Introduction

With the implementation of the national product quality improvement plan, the unified norms or principles used in the process of product design, manufacturing, measurement and inspection

needs are becoming more and more urgent. The surface structure representation method and related standards in the original product geometric technical specifications can no longer meet the requirements of the product manufacturing process.

Surface quality control requirements in the process.

GB/T 33523 "Product Geometric Specifications (GPS) Surface Structure Area Method" is based on the new generation of GPS product geometric specifications

Through digital measurement technology, software analysis technology and measurement evaluation, a new set of three-dimensional surface structure measurement and analysis

recommended national standards. GB/T 33523, on the basis of proposing the surface structure representation, surface structure parameters and standard operation set, analyzes

The method of surface structure measurement is given, the measurement technique used and the nominal characteristics of the instrument are given. In particular, GB/T 33523 covers contact

At the same time, it focuses on introducing a variety of non-contact measuring instruments that are of great value in high-precision measurement applications but lack standard support.

Measuring instrument. The standard also regulates physical measurement and software measurement standards, and gives software file standards and metrological characteristics of surface structure measurement.

GB/T 33523 realizes the leap from two-dimensional profile measurement to three-dimensional surface structure measurement, and provides a design basis for the GPS product geometric specification system.

Quantitative test support.

GB/T 33523 is proposed to consist of 14 parts.

--- Part 1.Representation of surface structure. The purpose is to specify the product technical documents (such as drawings, specifications, contracts and reports)

Rules for representing the surface structure of a region using graphical symbols.

--- Part 2.Terms, definitions and surface structure parameters. The purpose of this document is to specify the terms, definitions and

parameter.

--- Part 3.Specification operation set. The purpose is to provide complete rules applicable to the evaluation of surface structure (scale-limited surface) by the regional method.

Fan operation set.

--- Part 6.Classification of surface structure measurement methods. The purpose is to define a classification system mainly for methods of surface texture measurement,

Define three types of methods, describe the relationship between the three types of methods, and give a brief description of the specific methods.

--- Part 70.physical measurement standards. The purpose is to define a practice for the periodic verification and adjustment of area-based surface structure measurement instruments.

properties of physical measurement standards.

--- Part 71.Software measurement standards. The purpose is to specify the S1 and S2 software measurement standards for software calibration of measuring instruments.

Standard (etalon) term definition.

--- Part 72.XML file format x3p. The purpose is to specify XML files for storing and exchanging shape and contour data

Format x3p.

--- Part 601.Nominal characteristics of contact (stylus) instruments. The purpose is to specify the surface structure area method contact (stylus) type instrument

Nominal characteristics of the device.

--- Part 602.Nominal characteristics of non-contact (confocal chromatic aberration probe) instruments. The purpose is to specify the use of axial

Design and metrological characterization of a non-contact instrument for measuring surface structure with a confocal chromatic aberration probe for dispersion properties.

--- Part 603.Nominal characteristics of non-contact (phase-shift interference microscopy) instruments. The purpose is to specify the phase-shift interferometry (PSI) profile

and metrological properties of area surface structure measurement microscopes.

--- Part 604.Nominal characteristics of non-contact (coherent scanning interference) type instruments. The purpose is to specify the surface height three-dimensional mapping

Metrology characteristics of a coherent scanning interferometry (CSI) measurement system for radiation.

--- Part 605.Nominal characteristics of non-contact (point AF probe) instruments. The purpose is to specify the use of point AF probes

Metrological properties of non-contact instruments for measuring surface structures.

--- Part 606.Nominal characteristics of non-contact (zoom) instruments. The purpose is to specify the use of variable focus (FV) sensors to measure surfaces

Design and metrological characteristics of structured non-contact instruments.

--- Part 701.Calibration and measurement standards for contact (stylus) instruments. The purpose is to specify the area method surface structure contact (contact

The characteristics of physical measuring tools used as measurement standards for needle) instruments, the evaluation method of residual error, the inspection of calibration, acceptance and periodic verification

measurement method.

Product Geometry Specification (GPS)

Surface Structure Region Method

Part 603.Non-contact (phase-shift interference microscopy) methods

Nominal characteristics of the instrument

1 Scope

GB/T 33523.603-2022 covers phase-shifting interferometric microscopy, the most precise of the areal surface measurement techniques. It works by interfering light reflected from the surface with light from a reference, and reading height from the phase of the resulting fringes — which gives sub-nanometre vertical resolution, far beyond what a stylus or a confocal probe can reach. That makes it the instrument for optical surfaces, semiconductor wafers and precision seals, where the roughness being measured is a few atoms deep. Its precision comes with a specific limitation that the specification exists to make explicit: because phase repeats every half wavelength, a step taller than that is ambiguous, so the technique excels on smooth surfaces and fails on rough ones — the opposite of the instruments in the neighbouring parts. This part specifies the metrological characteristics of phase-shifting interferometric microscopes for profile and areal surface texture measurement. Under ICS 17.040.20 and CCS J04, it is written for instrument manufacturers, calibration and metrology laboratories, and the optics and semiconductor industries that depend on these measurements.

This document specifies the metrological characteristics of microscopes for phase-shift interferometry (PSI) profiling and areal surface structure measurements.

2 Normative references

This document has no normative references.

3 Terms and Definitions

The following terms and definitions apply to this document.

3.1 Terms and definitions related to all areal surface structure measurement methods

3.1.1

area reference arealreference

An integral part of an instrument that defines a reference surface for surface topography measurements.

3.1.2

Right-hand rule Cartesian coordinate system with (x, y, z) coordinate axes, where.

---(x, y) is the plane constructed by the regional reference of the instrument (Note. some optical instruments do not have actual regional guide reference);

--- For optical instruments, the Z axis is along the optical axis and perpendicular to the (x, y) plane; for stylus instruments, the Z axis is located on the stylus track

in the trace plane and perpendicular to the (x,y) plane.

Note 1.Usually, for instruments that scan in the horizontal plane, the X-axis is the scanning axis, and the Y-axis is the stepping axis.

Note 2.See also "Normative Coordinate System" [GB/T 33523.2-2017, 3.1.2] and "Measurement Coordinate System" [GB/T 33523.6-2017, 3.1.1].

see picture 1.