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GB/T 33140-2016Phosphorized copper anode used for integrated circuit (English PDF)

集成电路用磷铜阳极

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Issued by

SAMR; SAC

Level / Type

National · Recommended

Issue date

October 13, 2016

Implementation date

September 1, 2017

Scope

GB/T 33140-2016 is the English-translated version of 集成电路用磷铜阳极.

GB/T 33140-2016 is the Chinese standard "Phosphorized copper anode used for integrated circuit".

Its scope clause reads: This standard specifies the requirements, test methods, inspection rules and signs for the phosphor copper anode (hereinafter referred to as "phosphor copper anode") for integrated circuits Loading, shipping, storage, quality certificate and order (or contract).

This standard applies to all kinds of phosphor copper anode products for integrated circuits. Its clauses include normative reference documents; terms and definitions; requirements.

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Document preview — GB/T 33140-2016

National Standard of the People's Republic of China

ICS
77.150.30
Classification
H 62

Issued by: State Administration for Market Regulation; Standardization Administration of the PRC

Contents

  • 1 Scope
  • 2 normative reference documents
  • 3 terms and definitions
  • 4 requirements

1 Scope

This standard specifies the requirements, test methods, inspection rules and signs for the phosphor copper anode (hereinafter referred to as "phosphor copper anode") for integrated circuits

Loading, shipping, storage, quality certificate and order (or contract).

This standard applies to all kinds of phosphor copper anode products for integrated circuits.

2 normative reference documents

The following documents are indispensable for the application of this document. For dated references, only the dated edition applies to this article

Pieces. For undated references, the latest edition (including all modifications) applies to this document.

GB/T 3177 Geometrical product specifications (GPS) - Inspection of smooth workpiece dimensions

Methods for chemical analysis of copper and copper alloys - Part 2. Determination of phosphorus content GB/T GB/T 5121.4 Methods for chemical analysis of copper and copper alloys - Part 4. Determination of carbon and sulfur content

GB/T 5121.28 Methods for chemical analysis of copper and copper alloys - Part 28. Chromium, iron, manganese, cobalt, nickel, zinc, arsenic, selenium, silver, cadmium,

Determination of antimony, tellurium, lead and bismuth inductively coupled plasma mass spectrometry

General rules for the analysis of hydrogen, oxygen, nitrogen, carbon and sulfur in metallic materials GB/T Standard Test Method for Average Grain Size of Copper and Copper Alloys YS/T 347

YS/T 922 Methods for chemical analysis of high purity copper - Determination of trace impurity elements - Glow discharge mass spectrometry

3 terms and definitions

The following terms and definitions apply to this document.

3.1 Phosphor bronze anode

The electrochemical plating process is used in the integrated circuit to prepare the anode of the high purity copper metal coating.

4 requirements

4.1 Product classification

4.1.1

Phosphor Bronze Anodes are classified into round, rectangular and alien shapes (such as triangular, ring, etc.) by shape, as shown in Fig.

a) Round b) Rectangle c) Ring

Figure 1 Schematic diagram of phosphorous anode shape […]

......
This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 15 pages — is available in the English PDF.

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