GB/T 31353-2014Test methods for bow of sapphire substrates (English PDF)
蓝宝石衬底片弯曲度测试方法
This is a limited preview
Buy now to download the full PDF (15 pages)
Need quotation for your management?
Get a formal quotation for GB/T 31353-2014 in 30 minutes.
Issued by
SAMR; SAC
Level / Type
National · Recommended
Issue date
December 31, 2014
Implementation date
September 1, 2015
Scope
GB/T 31353-2014 is the English-translated version of 蓝宝石衬底片弯曲度测试方法.
GB/T 31353-2014 gives the method for testing bow in sapphire substrates, the name it uses for sapphire as-cut, lapped and polished slices. Clause 1 restricts its application to bow testing of sapphire substrates between 50.8 mm and 304.8 mm in diameter with a thickness of not less than 200 µm.
Clause 3 defines bow as the deviation of the centre of the median surface of an unclamped wafer from the reference plane, and defines that median surface reference plane as the plane fixed by three equidistant points on a circle of smaller diameter than the wafer's nominal diameter.
Clause 4 outlines three measuring techniques: a contact test, in which the substrate rests on a ring of three fulcrums that form the reference plane and a low-pressure indicator measures the distance of the substrate centre from that plane before and after the substrate is turned over, half the difference between the two readings being reported as the bow; a non-contact test, identical in arrangement but using a non-contact displacement sensor; and a white-light interferometric test, in which light reflected from the substrate surface forms an interference pattern recorded by an optical imaging system while the objective is stepped along the Z axis.
The standard draws on GB/T 2828.1 for acceptance sampling, GB/T 6619 for wafer bow test methods and GB/T 14264 for semiconductor material terminology. Its foreword warns that parts of the document may involve patents and that the body distributing it accepts no responsibility for identifying them.
It was jointly proposed and is jointly administered by the National Technical Committee on Semiconductor Materials (SAC/TC203) and its semiconductor equipment and materials sub-committee (SAC/TC203/SC2), with the Shanghai Institute of Optics and Fine Mechanics among the drafting organisations.
It carries ICS 77.040.99 and Chinese classification H21, was issued on 31 December 2014 and has applied since 1 September 2015.
Found what you need?
Document preview — GB/T 31353-2014
National Standard of the People's Republic of China
- ICS
- 77.040.99
- Classification
- H 21
Issued by: State Administration for Market Regulation; Standardization Administration of the PRC
Contents
- Foreword
- 1 Scope
- 2 Normative references
- 3 Terms and Definitions
- 4 Method summary
Foreword
This standard was drafted in accordance with GB/T 1.1-2009 given rules.
1 Scope
This standard specifies the sapphire cutting discs, abrasive sheet, polished (hereinafter referred to as sapphire substrate sheet) Test Method curvature.
This standard applies to the diameter of 50.8mm ~ 304.8mm, thickness not less than 200µm testing sapphire substrate sheet curvature.
2 Normative references
The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein Member. For undated references, the latest edition (including any amendments) applies to this document.
GB/T 2828.1 Sampling procedures for inspection - Part 1: by acceptance quality limit (AQL) retrieval batch inspection sampling plan
GB/T 6619 wafer curvature testing methods
GB/T 14264 semiconductor material terms
3 Terms and Definitions
GB/T 14264 and defined by the following terms and definitions apply to this document.
3.1 bow
Deflected without holding the wafer in planes and in the center of the reference plane between the planes.
3.2 median surface reference plane
Designated by the wafer is less than the nominal diameter of the plane three equidistant points on the circumference of the diameter of the decision.
4 Method summary
4.1 Contact test
The sapphire substrate sheet is placed on three fulcrum reference ring 3 forms a fulcrum reference plane, the use of low pressure indicator measuring displacement Sapphire substrate sheet test center distance from the reference plane, flip the substrate sheet, repeat the test. Half the difference between the two test values denotes a substrate Curvature of the sheet.
4.2 Non-contact test
The sapphire substrate sheet is placed on three reference fulcrum ring, three fulcrum formed a reference plane, the use of non-contact displacement sensor Test sapphire substrate sheet center distance from the reference plane, flip the substrate sheet, repeat the test. Half the difference between the two test values represent Bending of the substrate sheet.
4.3 White light interferometric test
Sapphire laser irradiation surface of the substrate sheet, the light reflected through the superposition of interference, the interference pattern recorded by the optical imaging system, the level of the beginning of shape Test appearance; in the Z-axis direction of the objective lens continues to move slightly, in each position thereof, the optical imaging system to collect image photographing, shaped
......
This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 15 pages — is available in the English PDF.
Referenced standards
Normative references
Similar standards
How to Download GB/T 31353-2014
- 1
Add to cart
Click "Download PDF" on this page and choose "Buy this standard". You can add more standards before checkout.
- 2
Checkout
Enter your email and billing details. Payment is processed securely by Stripe (cards or bank transfer). Prefer bank details? Request a quotation (min. order $300).
- 3
Instant delivery (0–9 sec)
Delivery is automatic: within seconds of payment you'll receive an email with a secure download link. The link stays valid for 72 hours.
- 4
Invoice included
A tax invoice is attached to the confirmation email. Need a custom invoice? Contact us.
Related Standards
GB/T 14264-2024 — Terminology of semiconductor materials
GB/T 2828.1-2012 — Sampling procedures for inspection by attributes - Part 1: Sampling schemes indexed by acceptance quality limit (AQL) for lot-by-lot inspection
GB/T 2828.10-2010 — Sampling procedures for inspection by attributes -- Part 10: Introduction to the GB/T 2828 series of standards for sampling for inspection by attributes
Secure payment via Stripe
Payments accepted
GB/T 31353-2014
$135.00