GB/T 31351-2014Nondestructive test method for micropipe density of polished monocrystalline silicon carbide wafers (English PDF)
碳化硅单晶抛光片微管密度无损检测方法
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Issued by
Standardization Administration of China
Level / Type
National · Recommended
Issue date
December 31, 2014
Implementation date
September 1, 2015
Scope
GB/T 31351-2014 is the English-translated version of 碳化硅单晶抛光片微管密度无损检测方法.
GB/T 31351-2014 — This standard specifies the NDT methods 4H and 6H polymorph crystalline silicon carbide single crystal polished microtubule density.
This standard applies to polymorph 4H and 6H-type silicon carbide single crystal polished by single-sided or double-sided polishing after polishing, microtubule radial dimension Microtubule density measurements within a micron to several tens of microns.
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Document preview — GB/T 31351-2014
National Standard of the People's Republic of China
- ICS
- 77.040.99
- Classification
- H 26
Issued by: Standardization Administration of China
Contents
- What this standard covers1
- Document data2
What this standard covers
This Standard specifies the NDT methods 4H and 6H crystal silicon carbide single crystal polished crystal emblem tube density. This Standard applies to 4H and 6H crystal silicon carbide single crystal polished microtubule density measured by the radial di
Document data
International classification (ICS): 77.040.99.
Chinese classification (CCS): H26.
Estimated length of the Chinese original: 7,730 words.
......
This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 5 pages — is available in the English PDF.
Referenced standards
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