GB/T 30860-2014Test methods for surface roughness and saw mark of silicon wafers for solar cells (English PDF)
太阳能电池用硅片表面粗糙度及切割线痕测试方法
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Issued by
SAMR; SAC
Level / Type
National · Recommended
Issue date
July 24, 2014
Implementation date
April 1, 2015
Scope
GB/T 30860-2014 is the English-translated version of 太阳能电池用硅片表面粗糙度及切割线痕测试方法.
GB/T 30860-2014 is the Chinese standard "Test methods for surface roughness and saw mark of silicon wafers for solar cells". Its scope clause reads: This standard specifies a solar cell wafers (hereinafter referred to as wafer) surface roughness and cutting line marks the contact or non-contact wheel Profile test methods.
This standard applies to cut through the line of processing technology monocrystalline and polycrystalline silicon wafer. If you need to apply to other products, it would take all relevant Parties agreed. Its clauses include terms and definitions; principle of the method.
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Document preview — GB/T 30860-2014
National Standard of the People's Republic of China
- ICS
- 77.040
- Classification
- H 21
Issued by: State Administration for Market Regulation; Standardization Administration of the PRC
Contents
- 1 Scope
- 2 Normative references
- 3 Terms and Definitions
- 4 principle of the method
1 Scope
This standard specifies a solar cell wafers (hereinafter referred to as wafer) surface roughness and cutting line marks the contact or non-contact wheel
Profile test methods.
This standard applies to cut through the line of processing technology monocrystalline and polycrystalline silicon wafer. If you need to apply to other products, it would take all relevant
Parties agreed.
2 Normative references
The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein
Member. For undated references, the latest edition (including any amendments) applies to this document.
GB/T 1031 Geometrical product specifications (GPS) Surface texture Profile method Surface roughness parameters and their values
GB/T 3505 Geometrical product specifications (GPS) Surface texture Profile method - Terms, definitions and surface texture parameters
GB/T 10610 Geometrical product specifications (GPS) Surface texture Profile method - Rules and procedures for evaluation of the surface structure
GB/T 14264 semiconductor material terms
GB/T 18777 Geometrical product specifications (GPS) Surface texture Profile method - Metrological characteristics of phase correct filters
GB/T 26071 monocrystalline silicon solar cells with a cutting disc
GB /Z26958 (all parts) Geometrical product specifications (GPS) filter
GB/T 29055 multicrystalline silicon wafers for solar cells
GB/T 29505 flat surface of a silicon wafer surface roughness measurement method
GB/T 30859 solar cell wafer warpage and waviness testing methods
3 Terms and Definitions
GB/T 1031, GB/T 3505, GB/T 10610, GB/T 14264, GB/T 18777, GB/T 26071, GB/T 29055 and
GB /Z26958 defined terms and definitions apply to this document.
4 principle of the method
4.1 surface roughness
4.1.1
The surface roughness is generally believed that silicon wafer surface spatial wavelength of less than 0.5mm wafer surface changes measured using a variety of access
Probe contact or non-contact technology, the silicon surface of single or multiple roughest areas, or certain provisions of the area, along a certain sweep
Described scanning path to obtain a silicon surface contour, and further the roughness profile is extracted, the final calculation of the wafer surface roughness.
4.1.2
Characterization of wafer surface roughness parameters recommended arithmetical mean deviation of roughness profile Ra, maximum height of roughness profile Rz,
RMS roughness profile Rq, average width roughness profile unit Rsm. Other parameters may also be used, if necessary. More details
See GB/T 1031, GB/T 3505, GB/T 10610, GB/T 18777, GB/T 26071, GB/T 29505 and GB/T 30859.
......
This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 15 pages — is available in the English PDF.
Referenced standards
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