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GB/T 29557-2013Surface chemical analysis -- Depth Profiling -- Measurement of sputtered depth (English PDF)

表面化学分析深度剖析溅射深度测量

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Issued by

Standardization Administration of China

Level / Type

National · Recommended

Issue date

July 19, 2013

Implementation date

March 1, 2014

Scope

GB/T 29557-2013 is the English-translated version of 表面化学分析深度剖析溅射深度测量.

GB/T 29557-2013 — This standard specifies the sputter depth profiling measuring the sputtering depth guidelines. This standard applies to combined ion bombardment release surface portion of the solid sample chemical analysis techniques, often sputter depth of up to a few microns.

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Document preview — GB/T 29557-2013

National Standard of the People's Republic of China

ICS: 71.040.40
Classification: G 04

Issued by: Standardization Administration of China

What this standard covers1
Document data2

What this standard covers

This standard specifies: sputter sputter depth profiling measured depth criteria. This standard applies to divest some combination of ion bombardment of solid samples surface chemical analysis techniques, usually sputter depth of up to a few microns.

Document data

International classification (ICS): 71.040.40.

Chinese classification (CCS): G04.

Estimated length of the Chinese original: 16,152 words.

Adopted international standard: ISO/TR 15969-2001.IDT.

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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 11 pages — is available in the English PDF.

Referenced standards

Cited by

GB/T 36504-2018Guide for the analysis of the printed circuit board surface contamination—Auger electron spectroscopy

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