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GB/T 25915.15-2022Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (English PDF)

洁净室及相关受控环境 第15部分: 按气态化学物浓度评定设备及材料的适用性

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Issued by

State Administration for Market Regulation, China National Standardization Administration

Level / Type

National · Recommended

Issue date

December 30, 2022

Implementation date

July 1, 2023

Scope

GB/T 25915.15-2022 is the English-translated version of 洁净室及相关受控环境 第15部分: 按气态化学物浓度评定设备及材料的适用性.

GB/T 25915.15-2022 is the Chinese standard "Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration".

Its scope clause reads: This document specifies requirements and provides guidance for assessing the suitability of equipment and materials for use in cleanrooms and related controlled environments.

This document does not apply to the following. ---Health and safety requirements; --- Compatibility of cleaning agents and cleaning technologies; ---cleanliness; --- Biological contamination; --- Process and product specific requirements for equipment and materials; ---Design details of the equipment. Its clauses include terms and definitions.

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Document preview — GB/T 25915.15-2022

National Standard of the People's Republic of China

ICS
13.040.35
Classification
C 70

Issued by: State Administration for Market Regulation, China National Standardization Administration

Contents

  • Preface
  • Introduction
  • 1 Scope
  • 2 Normative references
  • 3 Terms and Definitions
  • 4 symbols
  • 5 detection device
  • 6 representative mode
  • 7 Visual inspection
  • 8 Detection process
  • 9 Calculation of concentration
  • 10 Calculation of specific release rate
  • 11 rating
  • 12 records
  • Appendix A (informative) Examples of suitability assessment of installed equipment
  • Appendix C (informative) Applicability assessment of clean room equipment and floor materials at the design stage

1 Scope

This document specifies requirements and provides guidance for assessing the suitability of equipment and materials for use in cleanrooms and related controlled environments.

This document does not apply to the following.

---Health and safety requirements;

--- Compatibility of cleaning agents and cleaning technologies;

---cleanliness;

--- Biological contamination;

--- Process and product specific requirements for equipment and materials;

---Design details of the equipment.

2 Normative references

The contents of the following documents constitute the essential provisions of this document through normative references in the text. Among them, dated references

For documents, only the version corresponding to the date is applicable to this document; for undated reference documents, the latest version (including all amendments) is applicable to this document.

GB/T 25915.8-2021 Clean rooms and related controlled environments Part 8.Classification of air cleanliness by chemical concentration (ACC)

Class (ISO 14644-8.2013, IDT)

3 Terms and Definitions

The following terms and definitions apply to this document.

3.1

Any non-particulate chemical substance present in the air whose chemical properties may adversely affect products, processes, and equipment.

[Source. GB/T 25915.8-2021, 3.1.3, modified]

3.2

Expressed in ISO -ACC, it represents the maximum allowable concentration in grams per cubic meter for a given chemical species or group of chemicals.

Note. Biomacromolecules are classified as particles and are not included in this definition.

[Source. GB/T 25915.8-2021, 3.1.2]

3.3 Maximum gas carrying capacity breakthrough volume

At a specific temperature, the maximum volume of blown gas that can be drawn from the sampling device without loss of analyte.

GB/T 25915.14 | GB/T 25915.1 | GB/T 25915.2 | GB/T 25915.17 | GB/T 25915.16 | GB/T 25915.13 | […]

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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 37 pages — is available in the English PDF.

Referenced standards

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