GB/T 25915.14-2022Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (English PDF)

Foreword

This document was drafted in accordance with the rules provided in GB/T 1.1-2020

Directives for Standardization - Part 1: Rules for the Structure and Drafting of

Standardizing Documents.

This document is Part 14 of GB/T 25915 Cleanrooms and associated controlled

environments. The following parts have been issued for GB/T 25915:

-- Part 1: Classification of air cleanliness by particle concentration;

-- Part 2: Monitoring to provide evidence of cleanroom performance related to air

cleanliness by particle concentration;

-- Part 3: Test methods;

-- Part 4: Design, construction and start-up;

-- Part 5: Operations;

-- Part 6: Vocabulary;

-- Part 7: Separative devices (clean air hoods, gloveboxes, isolators and

minienvironments);

-- Part 8: Classification of air cleanliness by chemical concentration (ACC);

-- Part 9: Classification of surface cleanliness by particle concentration;

-- Part 10: Classification of surface cleanliness by chemical concentration;

-- Part 12: Specifications for monitoring of air cleanliness by nanoscale particle

concentration;

-- Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of

particle and chemical classifications;

-- Part 14: Assessment of suitability for use of equipment by airborne particle

concentration;

-- Part 15: Assessment of suitability for use of equipment and materials by airborne

chemical concentration.

This document is identical to ISO 14644-14:2016 Cleanrooms and associated

controlled environments - Part 14: Assessment of suitability for use of equipment by

airborne particle concentration.

Cleanrooms and associated controlled environments - Part

14: Assessment of suitability for use of equipment by

airborne particle concentration

1 Scope

This document applies to the assessment of the suitability of equipment (e.g., machinery,

measuring equipment, process equipment, components and tools) for use in cleanrooms

and associated controlled environments. As specified in GB/T 25915.1, airborne

particle sizes range from 0.1 µm to equal to or larger than 5 µm.

The following items are not covered by this document:

-- assessment of suitability with respect to biocontamination;

-- testing for suitability of decontamination agents and techniques;

-- cleanability of equipment and materials;

-- requirements on design of equipment and selection of materials;

-- physical properties of materials (e.g., electrostatic, thermal properties);

-- optimizing performance of equipment for specific process applications;

-- selection and use of statistical methods for testing;

-- protocols and requirements for local safety regulations.

2 Normative references

The following documents, in whole or in part, are normatively referenced in this

document and are indispensable to its application. For dated references, only the version

corresponding to that date is applicable to this document; for undated references, the

latest version (including all amendments) is applicable to this document.

GB/T 25915.1-2021, Cleanrooms and associated controlled environments - Part 1:

Classification of air cleanliness by particle concentration (ISO 14644-1:2015, MOD)

Note: There is no technical difference between the referenced content of GB/T

25915.1-2021 and the referenced content of ISO 14644-1:2015.

Note: Testing of equipment for ISO Class 1 suitability is accomplished in an ISO Class

1 environment.

The test environment shall not contain any other particle sources than the equipment to

be assessed to avoid influencing the measurement results. This can be achieved using

unidirectional airflow.