GB/T 19199-2015Test method for carbon acceptor concentration in semi-insulating gallium arsenide single crystals by infrared absorption spectroscopy (English PDF)
半绝缘砷化镓单晶中碳浓度的红外吸收测试方法
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Issued by
SAMR; SAC
Level / Type
National · Recommended
Issue date
December 10, 2015
Implementation date
July 1, 2016
Scope
GB/T 19199-2015 is the English-translated version of 半绝缘砷化镓单晶中碳浓度的红外吸收测试方法.
GB/T 19199-2015 is the Chinese standard "Test method for carbon acceptor concentration in semi-insulating gallium arsenide single crystals by infrared absorption spectroscopy".
Its scope clause reads: This standard specifies the semi-insulating GaAs single crystal carbon concentration infrared absorption test methods.
Determination of semi-insulating GaAs single crystals concentration of carbon This standard applies to more than 106ohm · cm resistivity undoped and doped with carbon. measuring Range. ambient temperature from 1.0 × 1015 atoms/cm3 to subrogation maximum solubility of carbon atoms, 77 K when a detection limit of.
Its clauses include terms and definitions; method summary; disturbances; equipment.
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Document preview — GB/T 19199-2015
National Standard of the People's Republic of China
- ICS
- 77.040
- Classification
- H 17
- Replacing
- GB/T 19199-2003
Issued by: State Administration for Market Regulation; Standardization Administration of the PRC
Contents
- 1 Scope
- 2 Normative references
- 3 Terms and Definitions
- 4 Method summary
- 5 disturbances
- 6 Equipment
1 Scope
This standard specifies the semi-insulating GaAs single crystal carbon concentration infrared absorption test methods.
Determination of semi-insulating GaAs single crystals concentration of carbon This standard applies to more than 106ohm · cm resistivity undoped and doped with carbon. measuring
Range. ambient temperature from 1.0 × 1015 atoms/cm3 to subrogation maximum solubility of carbon atoms, 77 K when a detection limit of
2 Normative references
The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein
Member. For undated references, the latest edition (including any amendments) applies to this document.
GB/T 14264 semiconductor material terms
3 Terms and Definitions
Terms and definitions GB/T 14264 apply to this document defined.
4 Method summary
Carbon as a semi-insulating gallium arsenide mainly shallow acceptor impurity, its localized modes of vibration bands (band room temperature peak is 580cm-1,77K band peak
Bit 582cm-1) absorption coefficient and a concentration of carbon subrogation correspondence, as measured by the absorption coefficient can be calculated according to the empirical formula C concentration.
5 disturbances
5.1
stray light reaching the detector, a carbon concentration of the test results will lead to deviation.
Testing area of 52,000 test sample should be larger than the diaphragm aperture, or it may lead to erroneous test results.
5.3
when tested at room temperature, gallium arsenide ribbon width at half maximum acceptable value should be less than 2cm-1. When the calculated spectra, the larger the FWHM Lead to measurement errors, FWHM determination method, see 9.2.7.
6 Equipment
6.1
Fourier transform infrared spectrometer, the instrument of minimum resolution should be better than 0.5cm-1.
6.3 micrometer
accuracy of 10µm.
......
This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 15 pages — is available in the English PDF.
Similar standards
Editions of GB/T 19199
| Edition | Title | Revision | Status |
|---|---|---|---|
| GB/T 19199-2015 | Test method for carbon acceptor concentration in semi-insulating gallium arsenide single crystals by infrared absorption spectroscopy | current edition | Current |
| GB/T 19199-2003 | Test method for carbon acceptor concentration in semi-insulating gallium arsenide single crystals by infrared absorption spectroscopy | previous edition | Superseded |
This page sells the current edition, GB/T 19199-2015. Earlier editions are listed for reference only.
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