SJ/T 11853-2022Positive pressure suspension zone melting single crystal silicon furnace (English PDF)
正压悬浮区熔单晶硅炉
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Issued by
Ministry of Industry and Information Technology
Level / Type
National · Recommended
Issue date
September 30, 2022
Implementation date
January 1, 2023
Scope
SJ/T 11853-2022 is the English-translated version of 正压悬浮区熔单晶硅炉.
SJ/T 11853-2022 — This standard specifies the product labeling and main parameters, technical requirements, test methods, inspection rules and signs, packaging, transportation and storage of positive pressure suspension zone melting single crystal silicon furnaces.
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Document preview — SJ/T 11853-2022
National Standard of the People's Republic of China
Issued by: Ministry of Industry and Information Technology
Contents
- What this standard covers1
- Document data2
What this standard covers
This standard specifies the product labeling and main parameters, technical requirements, test methods, inspection rules and signs, packaging, transportation and storage of positive pressure suspension zone melting single crystal silicon furnaces. It is suitable for monocrystalline silicon furnaces that use high-purity polycrystalline silicon as raw materials and use suspension zone melting method to grow semiconductor-grade monocrystalline silicon.
Document data
Estimated length of the Chinese original: 14,169 words.
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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 9 pages — is available in the English PDF.
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