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SJ/T 11853-2022Positive pressure suspension zone melting single crystal silicon furnace (English PDF)

正压悬浮区熔单晶硅炉

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Issued by

Ministry of Industry and Information Technology

Level / Type

National · Recommended

Issue date

September 30, 2022

Implementation date

January 1, 2023

Scope

SJ/T 11853-2022 is the English-translated version of 正压悬浮区熔单晶硅炉.

SJ/T 11853-2022 — This standard specifies the product labeling and main parameters, technical requirements, test methods, inspection rules and signs, packaging, transportation and storage of positive pressure suspension zone melting single crystal silicon furnaces.

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Document preview — SJ/T 11853-2022

National Standard of the People's Republic of China

Issued by: Ministry of Industry and Information Technology

Contents

  • What this standard covers1
  • Document data2

What this standard covers

This standard specifies the product labeling and main parameters, technical requirements, test methods, inspection rules and signs, packaging, transportation and storage of positive pressure suspension zone melting single crystal silicon furnaces. It is suitable for monocrystalline silicon furnaces that use high-purity polycrystalline silicon as raw materials and use suspension zone melting method to grow semiconductor-grade monocrystalline silicon.

Document data

Estimated length of the Chinese original: 14,169 words.

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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 9 pages — is available in the English PDF.

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SJ/T 11853-2022

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