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SJ/T 11516-2015Specification for thin film transistor (TFT) mask (English PDF)

薄膜晶体管（TFT）用掩模版规范

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Issued by

Ministry of Industry and Information Technology

Level / Type

National · Recommended

Issue date

April 30, 2015

Implementation date

October 1, 2015

Scope

SJ/T 11516-2015 is the English-translated version of 薄膜晶体管（TFT）用掩模版规范.

SJ/T 11516-2015 — Specification for thin film transistor (TFT) mask

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Document preview — SJ/T 11516-2015

National Standard of the People's Republic of China

ICS: 31.03
Classification: L 90

Issued by: Ministry of Industry and Information Technology

What this standard covers1
Document data2
Standards quoted by this document3

What this standard covers

This Standard specifies a thin film transistor (TFT) with the technical requirements of the reticle products, test methods, inspection rules and packaging, transport and storage.

Document data

International classification (ICS): 31.03.

Chinese classification (CCS): L90.

Estimated length of the Chinese original: 12,141 words.

Standards quoted by this document

GB 50073-2001; GB 191; GB/T 16880-1997; GB/T 2828.1-2003; SJ/T 10584-1994; SJ/T 10857-1996; SJ/T 10858-1996; SJ/T 10859-1996; SJ/T 10860-1996; SJ/T 10861-1996

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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 8 pages — is available in the English PDF.

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