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SJ/T 11502-2015Specification for polished monocrystalline silicon carbide wafers (English PDF)

碳化硅单晶抛光片规范

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Issued by

Ministry of Industry and Information Technology

Level / Type

National · Recommended

Issue date

April 30, 2015

Implementation date

October 1, 2015

Scope

SJ/T 11502-2015 is the English-translated version of 碳化硅单晶抛光片规范.

SJ/T 11502-2015 — This Standard specifies the terms and definitions of polished silicon carbide single product, grade, requirements, test methods, inspection rules, and packaging, labeling, storage and transportation and so on.

This Standard applies to the product type 6H and 4H, single-sided or double-sided polishing, diameter of 100mm and below the silicon carbide single crystal polished.

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Document preview — SJ/T 11502-2015

National Standard of the People's Republic of China

ICS: 29.045
Classification: H 83

Issued by: Ministry of Industry and Information Technology

What this standard covers1
Document data2
Standards quoted by this document3

What this standard covers

This Standard specifies the terms and definitions of polished silicon carbide single product, grade, requirements, test methods, inspection rules, and packaging, labeling, storage and transportation and so on. This Standard applies to the product type 6H and 4H, single-sided or double-sided polishing, diameter of 100mm and below the silicon carbide single crystal polished. Size or other crystalline silicon carbide single crystal can be polished using a reference.

Document data

International classification (ICS): 29.045.

Chinese classification (CCS): H83.

Estimated length of the Chinese original: 20,275 words.

Standards quoted by this document

GB/T 6619; GB/T 6620; GB/T 6621; GB/T 13387; GB/T 13388; GB/T 14264; GB/T 30866; GB/T 30867; GB/T 30868; SJ/T 11499; SJ/T 11500; SJ/T 11501; SJ/T 11503; SJ/T 11504

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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 13 pages — is available in the English PDF.

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