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SJ/T 10312-1992General specification of electron beam exposure system (English PDF)

电子束暴光机通用技术条件

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Issued by

Ministry of Electronics Industry

Level / Type

National · Recommended

Issue date

June 15, 1992

Implementation date

December 1, 1992

Scope

SJ/T 10312-1992 is the English-translated version of 电子束暴光机通用技术条件.

SJ/T 10312-1992 is the Chinese industry standard "General specification of electron beam exposure system". It was issued on June 15, 1992 by the Ministry of Electronics Industry, and took effect on December 1, 1992. It is in force.

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Document preview — SJ/T 10312-1992

National Standard of the People's Republic of China

Issued by: Ministry of Electronics Industry

Document data

1 Document data

Sector: Electronics (industry standard).

Issuing body: Ministry of Electronics Industry.

Date of issue: 1992-06-15.

Date of implementation: 1992-12-01.

Status: valid.

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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — all pages — is available in the English PDF.

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