GB/T 5226.33-2017Electrical safety of machinery -- Electrical equipment of machines -- Part 33: Requirements for semiconductor fabrication equipment (English PDF)

3.1 actuator

Part of a device to which an external manual action is applied.

Note 1: Handles, knobs, push-buttons, rollers, plungers and similar actuating parts.

Note 2: Some actuating means require only an action without an external applied force.

Note 3: See 3.40.

3.2 ambient temperature

Temperature of the air or other medium where the electrical equipment is to be used.

[IEV 826-01-04]

3.3 appliance coupler

Device enabling the connection and disconnection at will of a cord leading to an appliance or other equipment, consisting of a connector and an appliance inlet.

Note 1: The appliance inlet is integrated with the appliance or equipment; the shroud and base of the appliance inlet are formed by the enclosure of the appliance or equipment.

Note 2: An appliance inlet integrated with the appliance or equipment can be separately built in or fixed to the appliance or equipment.

3.4 automatic disconnection

Opening of one or more line conductors effected by the automatic operation of a protective device in case of a fault.

3.5 barrier

Part providing protection against direct contact from any usual direction of access.

[IEV 826-03-13]

3.6 basic insulation

Insulation of hazardous live parts which provides basic protection.

[IEV 195-06-06]

3.7 cable tray

Cable support consisting of a continuous base with slightly raised edges but no cover.

Note: A cable tray can be perforated or non-perforated.

[IEV 826-06-08]

3.8 cable trunking system

Enclosure system consisting of a base and a removable cover, intended to house insulated conductors, cables, cords and other electrical equipment.

[IEV 826-06-04]

3.9 concurrent

Acting in conjunction; used to describe a situation in which two or more control devices exist in an actuated condition at the same time (but not necessarily synchronously).

3.10 conduit

Tubular part used for wiring, through which insulated conductors and cables are drawn and can be replaced.

Note: Conduits should be jointed tightly so that the insulated conductors and/or cables can only be drawn in inside the conduit and not inserted from the side.

[IEV 826-06-03]

3.11 control device

Device connected into the control circuit and used for controlling the operation of the machine (for example position sensor, manual control switch, contactor, relay, solenoid valve).

3.12 controlgear

Combination of switching devices with associated control, measuring, protective and regulating equipment, and also assemblies of such devices and equipment with associated interconnections, accessories, enclosures and supporting structures, intended in principle for the control of electrical energy consuming equipment.

[IEV 441-11-03, modified]

3.13 controlled stop

Stopping of machine motion in which power to the machine actuators is maintained during the stopping process.

3.14 class II equipment

Equipment with:

- basic insulation as provision for basic protection;

- supplementary insulation as provision for fault protection;

- reinforced insulation providing basic protection and fault protection.

[IEC 61140, 7.3]

3.15 danger zone

Zone around hazardous live parts of high-voltage installations, systems and equipment, limited by the minimum electrical clearance, in which there is no complete protection against direct contact.

Note: Entering the danger zone is considered the same as touching hazardous live parts.

[IEC 61140, 3.35, modified]

3.16 direct contact

Contact of persons with live parts.

Note: For high-voltage installations, systems and equipment, entering the danger zone is considered the same as touching hazardous live parts.

[IEV 826-12-03]

3.17 direct opening action (of a contact element)

Achievement of contact separation as the direct result of a specified movement of the switch actuator through non-resilient members (i.e. not dependent upon springs).

[IEC 60947-5-1, K.2.2]

3.18 double insulation

Insulation comprising both basic insulation and supplementary insulation.

3.19 duct

Enclosed channel designed expressly for holding and protecting electrical conductors, cables and busbars.

Note: Types of duct include conduit (3.10), cable trunking system (3.8) and underfloor channels.

3.20 electronic equipment

Part of the electrical equipment containing circuitry whose operation depends on electronic devices and components.

3.21 emergency stop device

Manually actuated control device used to initiate an emergency stop function.

[ISO 13850, 3.2]

3.22 emergency off; EMO

Function which, when initiated, places the semiconductor equipment in a safe shutdown condition without generating any additional hazard.

3.23 enclosed electrical operating area

Room or location for electrical equipment, access to which is restricted to skilled or instructed persons by the opening of a door or the removal of a barrier with a key or tool, the electrical operating area being clearly marked with warning signs.

3.24 enclosure

Part providing protection of equipment against certain external influences and protection against any direct contact.

Note: The definition taken from the existing IEV needs the following explanations within the scope of this part:

a) the enclosure provides protection of persons against contact with hazardous parts;

b) barriers, forms of openings or any other means intended to prevent or limit the penetration of specified test probes, whether attached to the enclosure or formed by the enclosed equipment, are considered as part of the enclosure, unless they can be removed without the use of a key or tool;

c) an enclosure can be:

- a cabinet or box, either mounted on the machine or separate from the machine;

- a compartment consisting of an enclosed space within the machine structure.

3.25 equipotential bonding

Provision of electric connections between conductive parts, intended to achieve equipotentiality.

[IEV 195-1-10]

3.26 exposed conductive part

Conductive part of electrical equipment which can readily be touched and which is not normally live, but which can become live under fault conditions.

[IEV 826-12-10, modified]

3.27 extraneous conductive part

Conductive part not forming part of the electrical installation and liable to introduce a potential, generally earth potential.

[IEV 826-12-11, modified]

3.28 fabrication equipment

Machinery, with associated electrical equipment, instruments, process modules or devices, used to manufacture, measure, assemble and test semiconductor products, but excluding any product (for example substrates, semiconductors).

3.29 failure

Termination of the ability of an item to perform a required function.

Note 1: After failure, the item has a fault.

Note 2: "Failure" is an event, as distinguished from "fault", which is a state.

Note 3: The concept as defined does not apply to items consisting of software only.

Note 4: In practice, the terms fault and failure are often used synonymously.

[IEV 191-04-01, modified]

3.30 fault

State of an item characterized by inability to perform a required function, excluding the inability during preventive maintenance or other planned actions, or due to lack of external resources.

Note 1: A fault is often the result of a failure of the item itself, but may exist without prior failure.

Note 2: The English term "fault" and its definition are identical with those given in IEV 191-05-01. In the field of machinery, the French term "defaut" and the German term "Fehler" are used rather than the terms "Panne" and "Fehlzustand" that appear with this definition.

3.31 functional bonding

Equipotential bonding necessary for a specific function of the electrical equipment.

3.32 harm

Physical injury or damage to health.

[ISO 12100-1, 3.5]

3.33 hazard

Potential source of physical injury or damage to health.

Note: The term "hazard" can be qualified in order to define its origin (for example mechanical hazard, electrical hazard) or the nature of the potential harm (for example electric shock hazard, cutting hazard, toxic hazard, fire hazard).

Hazards are defined as follows:

- a hazard can be permanently present during the intended use of the machine (for example motion of hazardous moving elements, electric arc during a welding phase, unhealthy posture, noise emission, high temperature);

- a hazard can appear unexpectedly (for example explosion, crushing hazard as a consequence of an unintended/unexpected start-up, ejection as a consequence of a breakage, fall as a consequence of acceleration/deceleration).

[ISO 12100-1, 3.6, modified]

3.34 hazardous electrical power

Power source with a power greater than or equal to 240 VA.

3.35 hazardous-live-part

Live part which, under certain conditions, can give a harmful electric shock.

Note: A voltage greater than 30 V r.m.s., or 42.4 V peak, or 60 V d.c. is considered to present the possibility of a harmful electric shock.

[IEV 195-06-05]

3.36 hazardous situation

Circumstance in which a person is exposed to at least one hazard, the exposure of which can result in harm immediately or over a period of time.

[ISO 12100-1, 3.9]

3.37 hazardous voltage

Voltage greater than 30 V r.m.s., or 42.4 V peak, or 60 V d.c.

3.38 indirect contact

Contact of persons with exposed conductive parts which have become live under fault conditions.

[IEV 826-12-04, modified]

3.39 inductive power supply system

Inductive power transfer system consisting of a track converter and a track conductor, along which one or more pick-ups and associated pick-up converters can move without any galvanic or mechanical contact, for the purpose of transferring electrical energy (for example to movable machines).

Note: The track conductor and the pick-up are similar respectively to the primary and secondary windings of a transformer.

3.40 (electrically) instructed person

Person adequately advised or supervised by electrically skilled persons, enabling him or her to perceive risks and to avoid electrical hazards.

[IEV 826-18-02, modified]

3.41 interlock

Arrangement of several (kinds of) devices working together in order to prevent hazardous situations, to prevent damage to equipment or materials, to prevent incorrect operation and to ensure correct operation.

3.42 live part

Conductor or conductive part intended to be energized in normal operation, including a neutral conductor N, but by convention not a PEN conductor.

Note: This term does not necessarily imply a risk of electric shock.

[IEV 826-03-01]

3.43 machine actuator

Power mechanism used to effect motion of the machine.

Note: See 3.1.

3.44 machinery (machine)

Assembly of linked parts or components, at least one of which moves, with the appropriate machine actuators, control and power circuits, etc., joined together for a specific application, in particular for the processing, treatment, moving or packaging of a material.

The term "machinery" also covers an assembly of machines which, in order to achieve the same end, are arranged and controlled so that they function as an integral whole.

Note: The term "assembly" as used here is used in its general sense and is not limited to an assembly of electrical parts.

[ISO 12100-1, 3.1, modified]

3.45 maintenance

Intended keeping of the semiconductor equipment in normal operating condition.

Note: See 3.60.

3.46 marking

Principal signs or nameplates used to identify equipment, components and/or devices, which may include certain characteristics.

3.47 neutral conductor (symbol N)

Conductor connected to the neutral point of a system and capable of contributing to the transmission of electrical energy.

[IEV 826-01-03, modified]

Note: The neutral point is defined only in a.c. systems.

3.48 obstacle

Part preventing unintentional direct contact, but not preventing direct contact by deliberate action.

[IEV 826-03-14]

3.49 operator

Person who operates the semiconductor equipment and enables it to perform its intended function.

Note 1: The functions of an operator do not include maintenance and repair work.

Note 2: An operator is not required to have the knowledge and skills of a skilled person.

3.50 overcurrent

Any current exceeding the rated value.

Note: For conductors, the rated value is the current-carrying capacity.

[IEV 826-05-06, modified]

3.51 overload (of a circuit)

Time/current relationship in a circuit which is in excess of the rated full load when the circuit is not under a fault condition.

Note: Overload should not be used as a synonym for overcurrent.

3.52 plug/socket combination

Components and mating components suitable for conductor termination, intended for connecting and disconnecting two or more conductors.

Note: Examples of plug/socket combinations include:

- connectors in accordance with IEC 61984;

- power plugs and socket-outlets, cable couplers or appliance couplers in accordance with IEC 60309-1;

- power plugs and socket-outlets in accordance with IEC 60884-1, or appliance couplers in accordance with IEC 60320-1.

3.53 protective bonding

Equipotential bonding for protection against electric shock.

Note: Measures for protection against electric shock can also reduce the risk of burns or fire.

3.54 protective bonding circuit

Protective conductors and conductive parts connected together to provide protection against electric shock in the event of an insulation failure.

3.55 protective conductor

Protective bonding conductor required by some measures for protection against electric shock, for electrically connecting any of the following parts:

- exposed conductive parts;

- extraneous conductive parts;

- main earthing terminal.

Note: Protective "measures" such as automatic disconnection of supply.

[IEV 826-04-05, modified]

3.56 protective interlock circuit

Safety circuit whose purpose is to prevent hazardous operation under specified conditions. The safety circuit starts working when the relevant safety detection signal is triggered, and stops working when the hazard is eliminated or the risk is reduced.

3.57 readily accessible

Capable of being reached without requiring the use of tools, keys, portable ladders, platforms, climbing or the removal of obstacles or barriers.

3.58 reference designation

Distinctive code used to identify an item in documents and on equipment.

3.59 reinforced insulation

Insulation of hazardous live parts which provides a degree of protection against electric shock equivalent to double insulation.

Note: Reinforced insulation may comprise several layers which cannot be tested singly as basic insulation or supplementary insulation.

[IEV 195-06-09]

3.60 repair

Restoring semiconductor equipment that cannot operate normally to working order (see 3.45).

3.61 residual current device; RCD

Mechanical switching device designed to make, carry and break currents under normal conditions and to cause the opening of the contacts when the residual current attains a given value under specified conditions.

Note 1: A residual current device can be a combination of various separate elements designed to detect and evaluate the residual current and to make and break current.

Note 2: A GFCI (ground fault circuit interrupter) is a specific type of RCD.

[IEV 442-05-02, modified]

3.62 risk

Combination of the probability of occurrence of harm (i.e. physical injury or damage to health) and the severity of that harm.

[ISO 12100-1, 3.11, modified]

3.63 safeguard

Guard or protective device provided to protect persons from a hazard.

3.64 safeguarding

Protective measures using safeguards to protect persons. These protective measures keep persons away from hazards which cannot reasonably be removed or from risks which cannot be sufficiently reduced by inherently safe design measures.

Note: Protective interlocks are an example of safeguarding.

[ISO 12100-1, 3.20]

3.65 safety circuit

Circuit performing a safety function, intended to maintain the safe state of the semiconductor equipment or to avoid an increased risk in the event of a single fault.

Note: Safety circuits include protective interlock circuits and emergency off (EMO) circuits.

3.66 servicing level

Surface on which maintenance personnel normally stand when operating or maintaining the electrical equipment.

3.67 short-circuit current

Overcurrent resulting from a short circuit due to a fault or an incorrect connection in an electric circuit.

[IEV 441-11-07]

3.68 short-circuit rating of the electrical equipment

Maximum input current resulting from a short-circuit fault that the equipment can withstand under specified conditions.

Note 1: The protective devices within the equipment need to be suitably coordinated so that, at each connection point within the equipment, the short-circuit rating of every overcurrent protective device is at least equal to the prospective fault current, and adequate protection is provided by those devices.

Note 2: Where the electrical equipment (semiconductor equipment) uses multiple input supplies, the short-circuit current rating is determined for each supply.

3.69 (electrically) skilled person

Person with relevant technical knowledge or sufficient experience to enable him or her to perceive risks and to avoid electrical hazards.

[IEV 826-09-01, modified]

3.70 supplementary insulation

Independent insulation applied in addition to basic insulation for fault protection.

[IEV 195-06-08]

3.71 supplier

Entity (for example manufacturer, contractor, installer, integrator) who provides the electrical equipment or ancillary devices associated with the machine.

Note: The user can also act in the capacity of a supplier.

3.72 switching device

Device designed to make or break the current in one or more electric circuits.

Note: A switching device can perform one or both of these actions.

[IEV 441-14-01, modified]

3.73 touch voltage

Voltage between conductive parts when touched simultaneously by a person.

[IEV 195-05-11, modified]

3.74 uncontrolled stop

Stopping of machine motion by removing power to the machine actuators.

Note: This term does not imply any particular requirement for other stopping devices, for example mechanical or hydraulic brakes.

3.75 uninterruptible power supply; UPS

Power source capable of continuing to supply power when the facility power supply fails.

3.76 user

Entity that uses the machine and its associated electrical equipment.

4.1 General principles

As part of the overall technical requirements for the risk assessment of the semiconductor equipment, the risks associated with the hazards relating to the electrical equipment shall be assessed. This will adequately reduce the risks and provide the necessary protective measures for persons who may be exposed to hazards, so that the performance of the semiconductor equipment is maintained at a satisfactory level.

Hazardous situations can result from, but are not limited to, the following causes:

- failures or faults in the electrical equipment resulting in the possibility of electric shock or electrical fire;

- failures or faults in control circuits (or components and devices associated with those circuits) resulting in the malfunction of the machine;

- disturbances or disruptions in power sources, and failures or faults in the power circuits, resulting in the malfunction of the machine;

- loss of continuity of circuits that depend on sliding or rolling contacts, resulting in a failure of a safety function;

- electrical disturbances (for example electromagnetic, electrostatic) either from outside the electrical equipment or internally generated, resulting in the malfunction of the machine;

- release of stored energy (either electrical or mechanical) resulting in, for example, electric shock or unexpected movement that can cause injury;

- noise at levels that are harmful to the health of persons;

- surface temperatures that can cause injury.

Safety measures are a combination of the specific measures incorporated at the design stage and the measures required at the stage of use by the user.

In the design and development process, the hazards and risks arising from the machine and its electrical equipment shall first be identified. Where inherently safe design measures cannot remove the hazards or sufficiently reduce the risks, protective measures (for example safeguarding) shall be provided to reduce the risk. Where further risk reduction is necessary, additional means (for example warning means) shall be provided; in addition, working procedures that reduce risk are necessary.

4.2 Selection of electrical equipment

Electrical components used in safety systems and for controlling hazardous voltage or hazardous electrical power shall meet the following requirements:

- comply with the provisions of the relevant current national standards and IEC standards;

- alternatively, comply with the relevant standards developed by national-level standards organizations and/or with practicable documents meeting the assembly and testing requirements.