GB/T 47563-2026Micro-electromechanical systems (MEMS) technology - Technical specification for MEMS magnetic field sensors (English PDF)

6.1.1 Appearance and Marking

6.1.1.1 The sensor should be in good condition, without any damage or defects, and its structure should be robust; the markings should be clear and complete. The marking information should include at least... include.

a) Model number;

b) Traceability code (or batch number);

c) Pin markings.

6.1.1.2 The identification information should preferably include.

b) Manufacturer's name;

c) Direction of the magnetic sensing axis;

d) The center of the sensitive area.

6.1.1.3 The identification information should be consistent with the description in the device manual.

6.1.2 Temperature Range The sensor's maximum operating temperature range is -55°C to 125°C, and its maximum storage temperature range is -65°C to.200°C. If any of these ranges are exceeded... The specific temperature range requirements mentioned above should be clearly specified in the product's detailed specifications. The upper and lower limits of the operating temperature range and storage temperature range should be given in the device datasheet, with the lower limit preferably selected from the following temperature values. Select the following temperatures. -65°C, -55°C, -50°C, -43°C, -40°C, -33°C, -25°C, -20°C, -10°C, -5°C, 5°C. Upper limit. The values should preferably be selected from the following temperature ranges. 30°C, 35°C, 40°C, 45°C, 50°C, 55°C, 60°C, 65°C, 70°C, 85°C, 100°C. 125°C, 155°C, 175°C,.200°C.

Note. -65°C, 155°C, 175°C, and.200°C are only recommended values for storage temperature.

6.1.3 Relative Humidity Range The relative humidity of the sensor's operating environment should meet the requirements in Table 2.

6.1.4 Atmospheric pressure The sensor should operate within an atmospheric pressure range of 86 kPa to 106 kPa. Any special requirements exceeding this range should be specified in the product details. The detailed regulations clearly stipulate this.

6.1.5 Device Manual The manufacturer should provide a detailed device manual, providing a detailed description and illustrations of the sensor's external markings (see 6.1.1). The manual content should... At least include.

6.2 Electrical Requirements

6.2.1 Operating Voltage The nominal operating voltage of the sensor is specified by the manufacturer, and the sensor should be guaranteed to operate normally within the specified operating voltage range. Instruments are typically powered by DC power, and can be divided into two categories. unipolar power supply and bipolar power supply. Unless otherwise specified, the typical operating voltage of the sensor is... The following standard values should be selected for the type value.

a) Unipolar power supply options. 3.3V, 5V, 12V, 24V;

b) Bipolar power supply. ±3.3V, ±5V, ±12V, ±15V, ±24V. This requirement does not apply if the sensor itself does not require an external power source (such as a sensor that uses magnetoelectric coupling).

6.2.2 Static operating current The current consumed at the power supply terminal of the sensor when the measured magnetic field is zero under the nominal operating voltage, measured in milliamperes (mA). The static current of the sensor... The operating current should meet the requirements of the product technical conditions or detailed specifications.

6.2.3 Output Signal The sensor's output should preferably be an analog voltage signal. If other output formats are used, their output characteristics should meet the product's technical specifications. The provisions of the document or detailed specifications.

6.3 Performance Requirements

6.3.1 General Provisions According to the classification in Chapter 5, the applicable items in

6.3.15 can be selected as the performance requirements of the sensor.

6.3.2 Measurement Range The sensor's measurement range should conform to the product's technical specifications or detailed specifications. The unit of measurement range should preferably be Tesla (T). Millitesla (mT), microtesla (µT), or nanotesla (nT). Note

1.Tesla (T) and millitalas (mT) are generally suitable for sensors with a large measurement range, such as sensors using the Hall effect or those using the magnetoresistive effect. Sensors; nanotesla (nT) are typically suitable for sensors with small measurement ranges, such as sensors using the fluxgate principle or sensors using magnetoelectric coupling. Sensors. Note

2.Appendix A provides the conversion relationship between the International System of Units (SI) and the Centimeter-Gram-Sec (CGS) system of units.

6.3.3 Basic Error The fundamental error is expressed as a percentage error relative to the full-scale output (%FS). The sensor operates across its entire measurement range. The basic error within the range should comply with the provisions of the product technical conditions or detailed specifications.

6.3.4 Linearity Linearity is measured by the absolute value of the maximum deviation of the sensor's actual output characteristic curve relative to a reference straight line (least squares fitting) and the full-scale output. The ratio is expressed as %FS. The linearity of the sensor across its entire measurement range should comply with the product technical specifications or detailed specifications.

6.3.5 Sensitivity Under the specified power supply voltage and environmental conditions, the sensitivity of the sensor should meet the requirements of the product technical conditions or detailed specifications.

Note. The unit of sensitivity depends on the output form, such as the sensitivity of analog voltage output, which is expressed in V/T.

6.3.6 Zero-point output error The zero-point output error of the sensor should comply with the product technical conditions or detailed specifications, and the unit is µT (nT, pT).

Note. If the sensor's measurement range does not include zero magnetic field, the zero point is the minimum absolute value of the lower limit of the measurement range.

6.3.7 Hysteresis The hysteresis of the sensor should conform to the product technical conditions or detailed specifications, and the unit is µT (nT, pT).

6.3.8 Magnetic noise The magnetic noise performance of a sensor can be expressed as noise spectral density, with units of pT/Hz (µT/Hz, nT/Hz); or as a peak-to-peak value. The unit is pT (µT, nT). The magnetic noise measured by the sensor under specified conditions should conform to the product technical conditions or detailed specifications.

6.3.9 Amplitude-Frequency Response The amplitude-frequency response of the sensor should conform to the product technical conditions or detailed specifications; the -3dB cutoff frequency of the sensor should preferably be provided. Point, the unit is Hertz (Hz).

6.4.1 Temperature and Humidity

6.4.1.1 Low temperature After the sensor has undergone low-temperature testing, its appearance should meet the requirements of 6.1.1, and its relevant performance should meet the requirements of 6.3.

6.4.1.2 High Temperature After the sensor has undergone high-temperature testing, its appearance should meet the requirements of 6.1.1, and its relevant performance should meet the requirements of 6.3.

6.4.1.3 Temperature Change After the temperature change test, the appearance of the sensor should meet the requirements of 6.1.1, and the relevant performance should meet the requirements of 6.3.

6.4.1.4 Alternating Humid and Heat After undergoing alternating damp heat testing, the sensor's appearance should meet the requirements of 6.1.1, and its electrical performance, where applicable, should meet the requirements of 6.2, with a correlation... It should meet the requirements of 6.3.

6.4.2 Mechanical Properties

6.4.2.1 Lead-out end strength After the sensor undergoes the lead-out strength test, its appearance should meet the requirements of 6.1.1, and its relevant performance should meet the requirements of 6.3.

6.4.2.2 Solder joint strength After the solder joint strength test, the appearance of the sensor should meet the requirements of 6.1.1, and the relevant performance should meet the requirements of 6.3.

6.4.2.3 Vibration After the vibration test, the appearance of the sensor should meet the requirements of 6.1.1, and the relevant performance should meet the requirements of 6.3.

6.4.2.4 Impact After the sensor undergoes the impact test, its appearance should meet the requirements of 6.1.1, and its relevant performance should meet the requirements of 6.3.

6.4.3 Electromagnetic Compatibility Unless otherwise specified, the sensor shall be able to withstand electrostatic discharge immunity testing without damage, and its key performance indicators shall not exceed the specified allowable limits. The tolerance range is specified. After the test, the appearance should meet the requirements of 6.1.1, and the relevant performance should meet the requirements of 6.3.

7.1 Test Conditions

7.1.1 Environmental conditions The test should be conducted under the following environmental conditions.

a) Ambient temperature. 10°C~30°C;

b) Relative humidity. 40%~80%;

c) Interference magnetic field. The fluctuation amplitude of the magnetic field in the test area should not exceed 5% of the maximum permissible error of the sensor;

d) Mechanical vibration. No significant mechanical vibration effect.

7.1.2 Equipment Conditions The testing equipment shall be qualified through metrological verification or calibration and be within its validity period, and shall meet the following requirements.

a) Magnetic field system. - Magnetic field range. should cover the sensor's measurement range; - Magnetic field stability. should be better than 1/20 of the sensor's maximum permissible basic error; - Working area. should be no less than 3 times the size of the sensor's sensitive area; - Non-uniformity. should not exceed 1/5 of the sensor's maximum permissible basic error.

b) Output display device. The measurement range should cover the upper and lower limits of the sensor output, and its own noise should be lower than the sensor's noise floor. It is advisable to select... Low-noise digital multimeters or spectrum analyzers are used as measurement and reading devices.

c) High and low temperature test chamber. - Temperature range. Should cover the sensor's operating temperature and storage temperature range; - Deviation. Should not exceed ±2°C; - If a high-low temperature chamber without magnetic interference is used, the stray magnetic field inside the chamber should not exceed 10 nT; the requirements for magnetic field background are extremely high. For sensors (such as those using the fluxgate principle or the giant magnetoresistance effect), the stray magnetic field should preferably not exceed [value missing]. 5nT.

7.2 Appearance Visually inspect the appearance of the sensor. After the test, the appearance should meet the requirements of 6.1.1.

7.3 Electrical Testing

7.3.1 Static operating current test Connect the test circuit as shown in Figure 1, and apply the nominal operating voltage specified by the product to the sensor. Measure the power supply (VCC) pin of the sensor. The current obtained with the output terminal open-circuited is the sensor's static operating current. After the test, the static operating current should meet the following requirements. It meets the requirements of 6.2.2.

7.3.2 Output Signal Test Connect the test circuit as shown in Figure 2, and apply several magnetic fields of different intensities (covering its measurement range) to the sensor, along with the nominal strength specified by the product. Apply voltage, observe and record the corresponding changes in the sensor output. After the test, the output signal should meet the requirements of 6.2.3.

7.4 Performance Test

7.4.1 Basic Error Test the sensor's basic error using the following method.

a) At room temperature, place the sensor in a zero magnetic field environment, apply the rated operating voltage, and then gradually increase it starting from the lower limit of the measurement range. The magnetic field extends to the upper limit of the measurement range. The number of test points must be no less than seven, and must include at least the lower and upper limits of the measurement range.

b) The standard magnetic field value (Bi) corresponding to the i-th test point, the theoretical output value (U0i) of the sensor at that point, and the measured output value (Uri). Calculate the measurement error of the i-th test point according to formula (1).

7.4.2 Linearity Test the linearity of the sensor using the following method.

a) Select no fewer than 7 test points within the magnetic field measurement range, including at least the upper and lower limits of the measurement range. Apply a magnetic field to the sensor. With the rated operating voltage applied, place the sensor at the center of the working area of the magnetic field generator. Apply a magnetic field strength of approximately 50% of full scale. In the test, rotate the sensor and adjust its orientation to maximize the sensor's output voltage, and then fix this orientation for testing.

b) Control the magnetic field to gradually increase from its negative maximum value to its positive maximum value (positive stroke), and then gradually decrease it from its positive maximum value back to its negative maximum value. Maximum value (reverse travel). At each selected test point, record the standard magnetic field value, sensor supply voltage, and sensor output. Value. Calculate the linearity of the sensor according to formula (4).

7.4.3 Sensitivity Test the sensor's sensitivity using the following method.

a) Using the same linear fitting method as in 7.4.2c), the slope (kB) of the fitted line for the sensor output-magnetic field characteristics is obtained. This is the sensor's sensitivity (S);

b) For unipolar sensors whose output characteristics do not include a negative magnetic field range, the measurement range can be divided into two regions with zero magnetic field as the boundary. For each segment, the slope of each segment is calculated using the method described above, and the sensitivity of the sensor is determined by combining the results.

c) If the sensor's output amplitude is affected by the supply voltage (e.g., magnetoresistive, Hall effect, giant magnetoresistance sensors, etc.), then it should be... The measured sensitivity is normalized by dividing by the supply voltage, and the supply voltage value used is noted. After the test, the sensitivity should meet the requirements of 6.3.5.

7.4.4 Zero-point output error Test the zero-point output error of the sensor using the following method.

a) Provide a near-zero magnetic field environment using a magnetic shielding device. Place the sensor at the center of the working area within the shielded environment and record the sensing data. The output value (U) of the device when it is placed upright under zero magnetic field conditions;

b) Rotate the sensor -180° around its magnetic sensing axis and record the output value when the sensor is placed upside down under zero magnetic field conditions. (U-);

c) Calculate the zero-point output error of the sensor according to formula (9).