Valid

GB/T 45722-2025Semiconductor devices - Constant current electromigration test (English PDF)

半导体器件恒流电迁移试验

Preview PDF

This is a limited preview

Buy now to download the full PDF (24 pages)

Need quotation for your management?

Get a formal quotation for GB/T 45722-2025 in 30 minutes.

Issued by

State Administration for Market Regulation, China National Standardization Administration

Level / Type

National · Recommended

Issue date

May 30, 2025

Implementation date

September 1, 2025

Scope

GB/T 45722-2025 is the English-translated version of 半导体器件恒流电迁移试验.

GB/T 45722-2025 is the general constant current electromigration test for the metal interconnects of a chip, together with via chains and contact hole chains. It gives the background, the sample size, the test structures, the test conditions, the failure criteria and the data analysis, including the way the median failure time t(50%) is worked out.

The quantities are kept apart: the current density allowed in a via and in a metal line in the finished product, the current densities actually used on the test structures during the test, and the failure time at a given cumulative failure probability; the Blech length, the critical interconnect length below which electromigration failure becomes unlikely, is defined as well.

Foundries and reliability laboratories use it. Identical to IEC 62415:2010, it was issued on 30 May 2025 and applies from 1 September 2025.

Found what you need?

Document preview — GB/T 45722-2025

National Standard of the People's Republic of China

ICS: 31.080.01
Classification: L 40

Issued by: State Administration for Market Regulation, China National Standardization Administration

Preface
1 Scope
2 Normative references
3 Terms, definitions and symbols
4 Background
5 Sample size
6 Test Structure
7 Test conditions
8 Failure criteria
9 Data Analysis
References

Foreword

This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for standardization work Part 1: Structure and drafting rules for standardization documents" Drafting.

This document is equivalent to IEC 62415:2010 "Constant current electromigration test for semiconductor devices". This document adds a chapter on "Normative References".

1 Scope

This document describes the general constant current electromigration test method for metal interconnects, connecting via chains and contact hole chains.

2 Normative references

This document has no normative references.

3 Terms, definitions and symbols

3.1 Notation

The following symbols apply to this document.

3.1.1 Current density in via Jvia_use

The maximum current density allowed to flow through the through-hole of an actual product.

3.1.2 Current density in metal interconnect Jline_use

The maximum current density allowed to flow in the metal interconnect line of an actual product.

3.1.3 Current density in the via during the test Jvia_test

Current density in a through-hole test structure during electromigration testing.

3.1.4 Current density in metal interconnects during the test Jline_test

Current density in a metal interconnect test structure during electromigration testing.

3.1.5 Failure time t(x%)

The failure time with a cumulative failure probability of x%.

Note: For the calculation method of t(50%), see Chapter 9.

3.2 Terms and definitions

The following terms and definitions apply to this document.

3.2.1 Test structure TEG

Different test structures of metal interconnects, via chains and contact chains for electromigration testing.

3.2.2 Blechlength

The critical length of the interconnect line, below which electromigration failure is less likely to occur.

NOTE: The drift of metal atoms can lead to the accumulation of stress in metal interconnects, which in turn causes the reflow of atoms.

......
This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 24 pages — is available in the English PDF.

How to Download GB/T 45722-2025

1
Add to cart
Click "Download PDF" on this page and choose "Buy this standard". You can add more standards before checkout.
2
Checkout
Enter your email and billing details. Payment is processed securely by Stripe (cards or bank transfer). Prefer bank details? Request a quotation (min. order $300).
3
Instant delivery (0–9 sec)
Delivery is automatic: within seconds of payment you'll receive an email with a secure download link. The link stays valid for 72 hours.
4
Invoice included
A tax invoice is attached to the confirmation email. Need a custom invoice? Contact us.