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GB/T 43916-2024Vacuum technology - Vacuum gauges - Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges (English PDF)

真空技术真空计电容薄膜真空计的规范、校准和测量不确定度

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Issued by

State Administration for Market Regulation, China National Standardization Administration

Level / Type

National · Recommended

Issue date

April 25, 2024

Implementation date

April 25, 2024

Scope

GB/T 43916-2024 is the English-translated version of 真空技术真空计电容薄膜真空计的规范、校准和测量不确定度.

GB/T 43916-2024 — This document defines the terms related to capacitance diaphragm vacuum gauge (CDG), specifies the parameters that must be given for capacitance diaphragm vacuum gauge, and describes it describes the measurement uncertainty that must be considered during calibration and operation of the instrument: This document is applicable to the calibration of CDG using ISO 3567 and ISO 27893 and is a supplementary note when used as a reference standard:

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Document preview — GB/T 43916-2024

National Standard of the People's Republic of China

ICS: 23.160
Classification: J 78

Issued by: State Administration for Market Regulation, China National Standardization Administration

Preface
1 Scope
2 Normative references
3 Terms and Definitions
3.1 Composition
3.2 Physical parameters
3.3 Other parameters
4 Abbreviations
5 Capacitance diaphragm vacuum gauge
5.1 Principle
6 Capacitance Film Vacuum Gauge Specifications
6.1 Capacitance diaphragm vacuum gauge types
6.2 Regulating temperature control
6.3 Display and measurement of signal output unit
6.4 Measuring range of capacitance diaphragm vacuum gauge
6.5 Target measurement uncertainty
6.6 Temperature coefficient of zero point and full scale
6.7 Resolution
6.8 Regulatory response time
6.9 Warm-up time
6.10 Allowable pressure (maximum load pressure)
6.11 Destruction pressure (burst pressure)
6.12 Materials in contact with gases
6.13 Regulation installation direction
6.14 Chamber Interface
6.15 Internal volume
6.16 Interface and Pin Connection
6.17 Compatibility of regulators and controllers
6.18 Dimensions and mass of regulators and controllers
6.19 Normal working (environmental) conditions
6.20 Storage and transportation conditions
6.21 Power supply requirements
7 Additional (optional) specifications for capacitance diaphragm vacuum gauges
7.1 Reproducibility (long-term stability)
7.2 The tilt effect of the zero point
7.3 Zero point repeatability
7.4 Zero point durability after pressurization to full scale
7.5 Range durability after pressurization to full range
7.6 Zero point durability after pressurization to allowable pressure
7.7 Range durability after pressurization to allowable pressure
7.8 Update interval
7.9 Inner diameter of connecting pipe
7.10 Cable length
7.11 Pressure set point
7.12 Photo
7.13 Test records and calibration certificates
8 Calibration
8.1 Calibration Procedure
8.2 Calibration uncertainty
8.3 Calibration certificate
9 Measurement uncertainty in use
Appendix A (Informative) Compensation for thermal runaway effects
Reference

Foreword

This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for standardization work Part 1: Structure and drafting rules for standardization documents" Drafting:

This document is equivalent to ISO :20146:2019 "Vacuum technology - Vacuum gauges - Specifications, calibration and measurement uncertainty of capacitance diaphragm vacuum gauges":

"Determination":

The following minimal editorial changes were made to this document:

--- Supplemented the reference number description for the symbols in Figure A:1:

1 Scope

This document defines the terms related to capacitance diaphragm vacuum gauge (CDG), specifies the parameters that must be given for capacitance diaphragm vacuum gauge, and describes it describes the measurement uncertainty that must be considered during calibration and operation of the instrument:

This document is applicable to the calibration of CDG using ISO 3567 and ISO 27893 and is a supplementary note when used as a reference standard:

2 Normative references

The contents of the following documents constitute the essential clauses of this document through normative references in this document:

For referenced documents without a date, only the version corresponding to that date applies to this document; for referenced documents without a date, the latest version (including all amendments) applies to this document:

ISO 3529-1 Vacuum technology-Vocabulary-Part 1: General terms General terms) Note: GB/T 3163-2007 Vacuum technical terms (ISO 3529:1981, MOD) ISO 3529-3 Vacuum technology - Vocabulary - Part 3: Total and partial pressure vacuum gauges Note: GB/T 3163-2007 Vacuum technical terms (ISO 3529:1981, MOD) Note: GB/T 34873-2017 Vacuum gauge calibration by direct comparison with a standard vacuum gauge (ISO 3567:2011, IDT) ISO 27893 Vacuum technology - Uncertainty assessment of calibration results of vacuum gauges directly compared with standard vacuum gauges Note: GB/T 34876-2017 Vacuum technology Vacuum gauge and standard vacuum gauge direct comparison calibration results uncertainty assessment (ISO 27893:

2011, IDT)

ISO/IEC Guide 98-3 Uncertainty of measurement Part 3: Guide to the expression of uncertainty in measurement Note: GB/T 27418-2017 Evaluation and expression of measurement uncertainty (ISO/IEC Guide 98-3, MOD) ISO/IEC Guide 99 International Vocabulary of Metrology Basics and Common Concepts and Related Terms (VIM) [Internationalvocabu-

3 Terms and definitions

ISO 3529-1, ISO 3529-3, ISO 3567, ISO 27893, ISO/IEC Guide98-3, ISO/IEC Guide99 the following terms and definitions apply to this document:

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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 16 pages — is available in the English PDF.

Referenced standards

Normative references

ISO 3529 · ISO 3567 · ISO 27893

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