GB/T 43603.2-2024Methods for chemical analysis of nickel-platinum target alloys—Part 2: Determination of magnesium,aluminium,titanium,vanadium,chromium,manganese,iron,cobalt,coppe,zinc,zirconium,silver,palladium,tin,samarium,lead,silicon contents—Inductively coupled plasma mass spectrometry (English PDF)

Foreword

This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for standardization work Part 1: Structure and drafting rules for standardization documents" Drafting.

This document is part 2 of GB/T 43603 "Chemical analysis methods for nickel-platinum target alloys". GB/T 43603 has been published for the following part.

— Part 1: Determination of platinum content by inductively coupled plasma atomic emission spectrometry;

— Part 2: Determination of magnesium, aluminium, titanium, vanadium, chromium, manganese, iron, cobalt, copper, zinc, zirconium, silver, palladium, tin, samarium, lead and silicon content by inductive coupling In-Plasma Mass Spectrometry;

— Part 3: Determination of carbon content-High frequency infrared detection method.

Please note that some of the contents of this document may involve patents. The issuing organization of this document does not assume the responsibility for identifying patents.

This document was proposed by China Nonferrous Metals Industry Association.

This document is under the jurisdiction of the National Technical Committee on Standardization of Nonferrous Metals (SAC/TC243).

This document was drafted by: Guiyan Platinum Co., Ltd., Guiyan Testing Technology (Yunnan) Co., Ltd., Beijing Nonferrous Metals and Rare Earth Applications Research Institute Co., Ltd., Youyan Yijin New Materials Co., Ltd., Shenzhen Zhongjin Lingnan Nonferrous Metals Co., Ltd., National Standard (Beijing) Inspection Verification and Certification Co., Ltd., North Mine Testing Technology Co., Ltd., Tongling Nonferrous Metals Group Holdings Co., Ltd., Daye Nonferrous Design and Research Institute Co., Ltd., Zijin Copper Co., Ltd., Nanjing Product Quality Supervision and Inspection Institute (Nanjing Quality Development and Advanced Technology Application Research Institute), Shanxi North Copper Co., Ltd., Guangdong Academy of Sciences Industrial Analysis and Testing Center.

The main drafters of this document are: Li Qiuying, Zhao Wanchun, Wang Chuanjun, Zhu Wuxun, Sun Qi, He Jiao, Fang Haiyan, Wang Yuanyi, Yao Fang, Bao Yelin, He Jianwen, Zhang Qiang, Sun Menghe, Wang Yang, Zheng Pei, Huang Lulu, Gao Ruifeng, Zan Minjiao, Chen Xiaodong, Liao Guiping, Xiao Hongxin, Yan Peng, Pan Xiaoling, Liu Fangmei, Zhang Mengtian, and Liu Chaofang.

Introduction

Nickel-platinum target alloy is widely used in the semiconductor industry. It is a key material to ensure the performance of semiconductor devices and develop semiconductor technology.

The nickel-platinum target alloy with platinum content has special structure and properties, which plays an important role in the semiconductor manufacturing process.

The impurity composition of the nickel-platinum target alloy is directly related to the sputtering performance. Therefore, the chemical composition analysis of the nickel-platinum target alloy is particularly important;

GB/T 43603 is planned to consist of three parts according to the different test objects and test methods.

— Part 1: Determination of platinum content by inductively coupled plasma atomic emission spectrometry. The purpose is to specify nickel-platinum target alloy Inductively coupled plasma atomic emission spectrometry for determination of platinum content in water and its applicable determination range;

— Part 2: Determination of magnesium, aluminium, titanium, vanadium, chromium, manganese, iron, cobalt, copper, zinc, zirconium, silver, palladium, tin, samarium, lead and silicon content by inductive coupling Plasma mass spectrometry. The purpose is to determine the content of magnesium, aluminum, titanium, vanadium, chromium, manganese, iron, cobalt, copper, zinc, zirconium, silver, Inductively coupled plasma mass spectrometry for the determination of palladium, tin, samarium, lead and silicon content and its applicable determination range;

— Part 3: Determination of carbon content by high frequency infrared detection method. The purpose is to specify the high frequency infrared detection method for the determination of carbon content in nickel platinum target alloys.

Frequency infrared detection method and applicable measurement range.

The above documents clarify the scope of application, standardize reagents, materials, test equipment and procedures, and have been repeatedly tested by multiple laboratories.

The precision data is given through verification and validation, which enhances the consistency and comparability of data between different laboratories and provides a basis for testing the quality of nickel-platinum target alloys.

Establish a rigorous and standardized standardization foundation.

Chemical analysis method of nickel-platinum target alloy Part 2: Magnesium, aluminum, titanium, vanadium, chromium, manganese, iron, Cobalt, copper, zinc, zirconium, silver, palladium, tin, samarium, lead, silicon Determination of content Inductively Coupled Plasma Mass Spectrometry Warning---People who use this document should have practical experience in formal laboratory work. This document does not address all possible safety issues.

The user is responsible for taking appropriate safety and health measures and ensuring compliance with the conditions stipulated in relevant national laws and regulations.

1 Scope

This document describes the determination of magnesium, aluminum, titanium, vanadium, chromium, manganese, iron, cobalt, copper, zinc, zirconium, silver, palladium, tin, samarium, lead and silicon in nickel-platinum target alloys. Determine the method.

This document is applicable to the determination of magnesium, aluminum, titanium, vanadium, chromium, manganese, iron, cobalt, copper, zinc, zirconium, silver, palladium, tin, samarium, lead and silicon content in nickel-platinum target alloys.

The measurement range is shown in Table 1. Table 1 Measurement range element Measurement range (mass fraction) element Measurement range (mass fraction) Ti 0.000010~0.010 Pd 0.000050~0.010 Ag 0.000010~0.010 Pb 0.000050~0.010 Sn 0.000010~0.010 Mg 0.00010~0.010 Sm 0.000010~0.010 Cu 0.00010~0.010 Zn 0.000050~0.010 Fe 0.00010~0.010 Al 0.000050~0.010 Co 0.00010~0.010 Cr 0.000050~0.010 Zr 0.00010~0.010 Mn 0.000050~0.010 Si 0.00050~0.010 V 0.000050~0.010 - -

2 Normative references

GB/T 8170

GB/T 17684