GB/T 40333-2021Vacuum gauges - Definitions and specifications for quadrupole mass spectrometers (English PDF)
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Issued by
State Administration for Market Regulation, China National Standardization Administration
Level / Type
National · Recommended
Issue date
May 21, 2021
Implementation date
December 1, 2021
Scope
GB/T 40333-2021 (Vacuum gauges - Definitions and specifications for quadrupole mass spectrometers) is available as an English-translated PDF.
GB/T 40333-2021 — This standard defines the terms related to quadrupole mass spectrometers and specifies the parameters required in the manufacturer's instructions for normal calibration and analysis. Guarantee of pressure measurement quality. This standard applies to quadrupole mass spectrometers equipped with electron bombardment ion sources. Such a quadrupole mass spectrometer is usually used to measure the mass-to-charge ratio (m/z) Substances less than 300.Equipped with other types of ion sources such as chemical ionization, photoionization, field ionization, etc., and are mainly used for detection A quadrupole mass spectrometer for specific organic substances with a mass-to-charge ratio (m/z) greater than 300 is not within the scope of this standard.
Document preview — GB/T 40333-2021
National Standard of the People's Republic of China
- Classification
- J 78
Issued by: State Administration for Market Regulation, China National Standardization Administration
Contents
- 1 Scope1
- 2 Terms and definitions1
- 2.1 Components1
- 2.2 Physical parameters4
- 3 Symbols and abbreviations8
- 4 Principle of Quadrupole Mass Spectrometer8
- 5 The instruction manual of the quadrupole mass spectrometer provided by the manufacturer9
- 5.1 Quality scope9
- 5.2 Ion source type9
- 5.3 Type of ion detector9
- 5.4 Mass resolution9
- 5.5 Mass number stability9
- 5.6 Sensitivity9
- 5.7 Linear response range9
- 5.8 Minimum detectable pressure9
- 5.9 Minimum detectable concentration9
- 5.10 Maximum working pressure10
- 5.11 Scan parameters10
- 5.12 Signal output10
- 5.13 Potential10
- 5.14 Detector technical specifications10
- 5.15 Set value10
- 5.16 Maximum baking temperature10
- 5.17 Nominal working environment10
- 5.18 Warm-up time10
- 5.19 Filament material10
- 5.20 Electron emission current10
- 5.21 Replacing the filament11
- 5.22 Replacing the detector11
- 5.23 Chamber interface11
- 5.24 Installation direction11
- 5.25 size11
- 5.26 Internal volume11
- 5.27 The quality of the sensor head and the electronic control unit11
- 5.28 The input power of the electronic control unit11
- 5.29 Cable11
- 5.30 Software11
- 5.31 Interface relationship11
- 5.32 Storage and transportation conditions11
- 6 The manufacturer's additional instructions for the quadrupole mass spectrometer12
- 6.1 Mass resolution12
- 6.2 Graphic factor12
- 6.3 Temperature coefficient of sensitivity12
- 6.4 Cleaning the quadrupole mass spectrometer sensor12
- 6.5 Degassing12
- 6.6 Degassing power supply12
- 6.7 Picture12
- 6.8 Inspection records12
- 6.9 Outgassing rate12
- Reference13
Foreword
This standard was drafted in accordance with the rules given in GB/T 1.1-2009.
The translation method used in this standard is equivalent to ISO 14291.2012 "Definition and Specification of Vacuum Gauge Quadrupole Mass Spectrometer".
This standard was proposed by the China Machinery Industry Federation.
This standard is under the jurisdiction of the National Vacuum Technology Standardization Technical Committee (SAC/TC18).
Drafting organizations of this standard. Lanzhou Institute of Space Technology Physics, Anhui Wanyi Technology Co., Ltd., Anhui Gebo Technology Co., Ltd.,
Hunan Vigor Magnetic Fluid Co., Ltd., Huizhou Feike New Material Co., Ltd., Shenyang Vacuum Technology Research Institute Co., Ltd.
Introduction
Quadrupole mass spectrometer (QMS) can now not only be used in vacuum leak detection and residual gas analysis, but also as a quantitative analysis instrument
In process control such as physical and chemical vapor deposition, and etching.
Factors such as total pressure, mixed gas composition, instrument parameter settings, and environmental conditions will all affect the measurement results and measurement uncertainty of the quadrupole mass spectrometer.
Degree has an important impact. Therefore, the calibration of the quadrupole mass spectrometer cannot cover all applications, and the calibration must meet specific conditions of use or
Standardized conditions.
At the same time, in order to facilitate users to compare the performance of quadrupole mass spectrometers produced by different manufacturers, and to be able to use the instrument correctly, it is necessary to use this standard.
Standardization.
This standard has taken the first step to establish the direction of the standard calibration process of quadrupole mass spectrometers by standardizing terms and parameters.
Definition and specification of vacuum gauge quadrupole mass spectrometer
1 Scope
This standard defines the terms related to quadrupole mass spectrometers and specifies the parameters required in the manufacturer's instructions for normal calibration and analysis.
Guarantee of pressure measurement quality.
This standard applies to quadrupole mass spectrometers equipped with electron bombardment ion sources. Such a quadrupole mass spectrometer is usually used to measure the mass-to-charge ratio
(m/z) Substances less than 300.Equipped with other types of ion sources such as chemical ionization, photoionization, field ionization, etc., and are mainly used for detection
A quadrupole mass spectrometer for specific organic substances with a mass-to-charge ratio (m/z) greater than 300 is not within the scope of this standard.
2 Terms and definitions
The following terms and definitions apply to this document.
2.1 Components
2.1.1
Quadrupole mass spectrometer; QMS
The axially incident ions enter a quadrupole lens system composed of four electrodes (usually rods).
A mass spectrometer that allows only ions with a certain mass-to-charge ratio to pass through a current electric field.
[ISO 3529-3.1981[2], definition 3.5.2.2]
Note. Such a quadrupole mass spectrometer consists of a sensor head and an electronic control unit.
2.1.2
Sensorhead
Analyzertube
Sensor
Sensor unit
Sensinghead
Gaugehead
Regulate gaugehead
An integral part including ion source, quadrupole mass filter and ion detector.
2.1.3
Ionsource
The part of a quadrupole mass spectrometer that ionizes gas molecules and atoms into ions.
Note. In order to generate positive ions, the ion source generally uses electron bombardment ionization.
2.1.3.1
Open ion source openionsource
The ion source with high conductivity to the surrounding vacuum environment is usually designed as an open grid structure.
Note. All functional parts of the ion source are exposed to the same vacuum area.
2.1.3.2
Closed ion source closed source; enclosed source
......
This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — all pages — is available in the English PDF.
Referenced standards
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