GB/T 33523.606-2022Geometrical product specifications (GPS) - Surface texture: Areal - Part 606: Nominal characteristics of non-contact (focus variation) instruments (English PDF)

foreword

This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for Standardization Work Part 1.Structure and Drafting Rules for Standardization Documents"

drafting.

This document is part 606 of GB/T 33523 "Geometric Specification for Products (GPS) Surface Structure Area Law".

GB/T 33523 has issued the following parts.

--- Part 1.Representation of surface structure;

--- Part 2.Terms, definitions and surface structure parameters;

--- Part 3.Specification operation set;

--- Part 6.Classification of surface structure measurement methods;

--- Part 70.Physical measurement standards;

--- Part 71.Software measurement standards;

--- Part 72.XML file format x3p;

--- Part 601.Nominal characteristics of contact (stylus) instruments;

--- Part 602.Nominal characteristics of non-contact (confocal chromatic aberration probe) instruments;

--- Part 603.Nominal characteristics of non-contact (phase-shift interference microscopy) instruments;

--- Part 604.Nominal characteristics of non-contact (coherent scanning interference) instruments;

--- Part 605.Nominal characteristics of non-contact (point autofocus probe) instruments;

--- Part 606.Nominal characteristics of non-contact (zoom) instruments;

--- Part 701.Calibration and measurement standards for contact (stylus) instruments.

This document is equivalent to ISO 25178-606.2015 "Product Geometric Specifications (GPS) Surface Structure Area Law Part 606

Part. Nominal Characteristics of Non-Contact (Zoom) Instruments".

Please note that some contents of this document may refer to patents. The issuing agency of this document assumes no responsibility for identifying patents.

Introduction

With the implementation of the national product quality improvement plan, the unified norms or principles used in the process of product design, manufacturing, measurement and inspection

needs are becoming more and more urgent. The surface structure representation method and related standards in the original product geometric technical specifications can no longer meet the requirements of the product manufacturing process.

Surface quality control requirements in the process.

GB/T 33523 "Product Geometric Specifications (GPS) Surface Structure Area Method" is based on the new generation of GPS product geometric specifications

Through digital measurement technology, software analysis technology and measurement evaluation, a new set of three-dimensional surface structure measurement and analysis

recommended national standards. GB/T 33523, on the basis of proposing the surface structure representation, surface structure parameters and standard operation set, analyzes

The method of surface structure measurement is given, the measurement technique used and the nominal characteristics of the instrument are given. In particular, GB/T 33523 covers contact

At the same time, it focuses on introducing a variety of non-contact measuring instruments that are of great value in high-precision measurement applications but lack standard support.

Measuring instrument. GB/T 33523 also regulates physical measurement and software measurement standards, and provides software file standards and surface structure measurement standards.

quantitative characteristics. GB/T 33523 realizes the leap from two-dimensional profile measurement to three-dimensional surface structure measurement, and is the standard system for GPS product geometry

Provides metrology test support.

GB/T 33523 is proposed to consist of 14 parts.

--- Part 1.Representation of surface structure. Specifies the use of diagrams in product technical documents (such as drawings, specifications, contracts and reports)

Shaped symbols represent the rules of the surface structure of the region.

--- Part 2.Terms, definitions and surface structure parameters. Specifies the terms, definitions and parameters for the evaluation of surface structure by the area method.

--- Part 3.Specification operation set. A complete set of normative operations applicable to the evaluation of surface structure (scale-bound surfaces) by the zonal method is specified.

--- Part 6.Classification of surface structure measurement methods. Specifies the classification system mainly used for surface structure measurement methods, defines

Three types of methods describe the relationship between the three types of methods and give a brief description of the specific methods.

--- Part 70.physical measurement standards. Specifies physical measurements for periodic verification and adjustment of area-based surface structure measurement instruments

standard features.

--- Part 71.Software measurement standards. Specifies the S1 and S2 software measurement standards for software calibration of measuring instruments (standard

Definition of terms).

--- Part 72.XML file format x3p. Specifies the XML file format x3p for storing and exchanging topography and contour data.

--- Part 601.Nominal characteristics of contact (stylus) instruments. Specifies the standard for surface structure area method contact (stylus) instruments

called characteristics.

--- Part 602.Nominal characteristics of non-contact (confocal chromatic aberration probe) instruments. It stipulates the use of white light based on the axial dispersion characteristic

Design and metrological characterization of a non-contact instrument for the measurement of surface structure with a revolutionary confocal chromatic aberration probe.

--- Part 603.Nominal characteristics of non-contact (phase-shift interference microscopy) instruments. Phase shift interferometry (PSI) profile and area specified

Metrological properties of surface structure measurement microscopes.

--- Part 604.Nominal characteristics of non-contact (coherent scanning interference) type instruments. Specifies the phase for 3D mapping of surface heights

Metrology characterization of dry scanning interferometry (CSI) measurement systems.

--- Part 605.Nominal characteristics of non-contact (point AF probe) instruments. specifies the use of point autofocus probe measurements

Metrological properties of surface structures for non-contact instruments.

--- Part 606.Nominal characteristics of non-contact (zoom) instruments. Specifies the use of variable focus (FV) sensors to measure surface structure

Design and metrological characteristics of non-contact instruments.

--- Part 701.Calibration and measurement standards for contact (stylus) instruments. Specifies the area method surface structure contact (stylus) type instrument

The characteristics of physical measuring tools used as measurement standards, the evaluation methods of residual errors, and the detection methods of calibration, acceptance and periodic verification.

Product Geometry Specification (GPS) Surface Structure

District Code Part 606.Contactless

Nominal characteristics of (zoom) instruments

1 Scope

This document specifies the metrological characteristics of non-contact instruments for measuring surface structures using variable focus (FV) sensors.

2 Normative references

The contents of the following documents constitute the essential provisions of this document through normative references in the text. Among them, dated references

For documents, only the version corresponding to the date is applicable to this document; for undated reference documents, the latest version (including all amendments) is applicable to

this document.

ISO 3274 Geometric product specification (GPS) Nominal characteristics of contact (stylus) instruments by surface texture profiling method [Geo-

Note. GB/T 6062-2009 Product Geometric Specifications (GPS) Surface Structure Profile Method Nominal Characteristics of Contact (Style) Instruments

(ISO 3274.1996, IDT)

ISO 4287 Geometric product specification (GPS) Surface structure profilometry terms, definitions and surface structure parameters [Geomet-

textureparameters]

Note. GB/T 3505-2009 Product Geometric Specifications (GPS) Surface Structure Profile Method Terms, Definitions and Surface Structure Parameters (ISO 4287.

1997, IDT)

ISO 10934-2 Microscope vocabulary for optics and optical instruments Part 2.Advanced techniques for optical microscopy (Opticsandoptical

ISO 14978 Geometric product specification (GPS) General concepts and requirements for GPS measuring equipment [Geometricalproduct

Note. GB/T 24634-2009 Geometric Product Specifications (GPS) General Concepts and Requirements for GPS Measuring Equipment (ISO 14978.2006, IDT)

ISO 17450-1 Geometric product specification (GPS) General concepts Part 1.Models for geometric specification and inspection [Geomet-

verification]

Note. GB/T 24637.1-2020 Product Geometric Specifications (GPS) General Concepts Part 1.Models for Geometric Specifications and Inspections (ISO 17450-

1.2011, MOD)

ISO 25178-2 Geometric Product Specification (GPS) Surface Structure Area Method Part 2.Terms, Definitions and Surface Structure

Note. GB/T 33523.2-2017 Product Geometric Specifications (GPS) Surface Structure Area Method Part 2.Terms, Definitions and Surface Structure Parameters

(ISO 25178-2.2012, IDT)

ISO 25178-3 Product Geometric Specifications (GPS) Surface Structure Area Method Part 3.Specification Operation Set [Geometrical