GB/T 30704-2014Surface chemical analysis -- X-ray photoelectron spectroscopy -- Guidelines for analysis (English PDF)

Foreword

This standard was drafted in accordance with GB/T 1.1-2009 given rules.

This standard uses the translation method identical with ISO 10810:2010 "Surface chemical analysis - X-ray photoelectron spectroscopy Guide." Correspondence between the consistency of the standards of international documents and normative references of the following documents.

--- GB/T 27025-2008 testing and calibration laboratories General requirements (ISO/IEC 17025:2005, IDT)

--- GB/T 22461-2008 Surface chemical analysis - Vocabulary (ISO 18115:2001, IDT) the standard micro-beam analysis by the National Standardization Technical Committee (SAC/TC38) and focal points.

This standard was drafted. Institute of Chemistry.

Drafters of this standard. Zhaozhi Juan, Liu Fen, Zhao Liang-Zhong, Zhang Xiao Yu.

Introduction

X-ray photoelectron spectroscopy (XPS) has been widely used for surface analysis of materials. The measured core level binding energy and binding energy of various elements

Table control to identify the elements in the sample (except for H, He). Comparison with the data of pure elemental, chemical shifts are based on state may peak

And changes in other parameters to determine. Quantitative information elements obtained from the intensity of the peak in the electronic metering. The use of formulas and equipment manufacturers to provide or relative sensitivity factors and the appropriate software. The measuring instrument can calculate the measured content of the surface layer of each chemical component.

This standard is intended to help the X-ray photoelectron spectroscopy operator for effective and meaningful analysis of typical samples.

Surface chemical analysis X-ray photoelectron spectroscopy Guide

1 Scope

This standard applies to X-ray photoelectron spectroscopy analysis of a representative sample of the operator. This standard helps the operator to complete the entire analyzed Cheng, including sample handling, spectrometer calibration and settings as well as a wide collection scanning spectrum and narrow spectral scanning, and gives quantitative and prepare the final report Suggest.

2 Normative references

The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein Member. For undated references, the latest edition (including any amendments) applies to this document.

ISO/IEC 17025 General requirements for testing and calibration laboratories (Generalrequirementsforthecompetenceof testingandcalibrationlaboratories) ISO 18115-1 Surface chemical analysis - Vocabulary - Part 1. General terms and spectrum of academic language (Surfacechemical analysis-Vocabulary-Part 1. Generaltermsandtermsusedinspectroscopy)

3 Terms and Definitions

Terms and definitions defined in ISO 18115-1 apply to this document.

4 Symbols and Abbreviations

The following symbols and abbreviations apply to this document.

AES Auger electron spectroscopy (Augerelectronspectroscopy) ARXPS variable-angle X-ray photoelectron spectroscopy (Angle-resolvedX-rayphotoelectronspectroscopy) the amount of the Advisory Committee CCQM substance (Consultativecommitteeforamountofsubstance) CRM certified standard (reference) substance (Certifiedreferencematerial) EAL effective attenuation length (Effectiveattenuationlength) FAT fixed energy analyzer (Fixedanalysertransmission) FRR fixed reduction ratio (Fixedretardratio) FWHM half height width (Fulwidthathalfmaximum) IERF intensity/energy response function (Intensity/energyresponsefunction) NIST National Institute of Standards and Technology (NationalInstituteofStandardsandTechnology) NPL National Physical Laboratory (NationalPhysicalLaboratory) RM standard (reference) substance (Referencematerial) RSD remaining (residual) standard deviation (Residualstandarddeviation) S/N noise ratio (Signaltonoiseratio) XPS X-ray photoelectron spectroscopy (X-rayphotoelectronspectroscopy)