GB/T 29732-2021Surface chemical analysis - Medium resolution auger electron spectrometers - Calibration of energy scales for elemental analysis (English PDF)

foreword

This document is in accordance with the provisions of GB/T 1:1-2020 "Guidelines for Standardization Work Part 1: Structure and Drafting Rules of Standardization Documents"

drafted:

This document replaces GB/T 29732-2013 "Energy for elemental analysis by medium resolution Auger electron spectrometer for surface chemical analysis"

Standard Calibration", compared with GB/T 29732-2013, except for editorial modifications, the main technical changes are:

---Change the "Resolution" in the file to "Resolution":

This document is identical to ISO 17973:2016 "Energy Scale for Elemental Analysis by Medium Resolution Auger Electron Spectrometer for Surface Chemical Analysis"

calibration":

Please note that some content of this document may be patented: The issuing agency of this document assumes no responsibility for identifying patents:

Introduction

Auger Electron Spectroscopy (AES) is widely used for surface analysis of materials: By comparing the energy and shape of the Auger electron peak, identify the

Contains different elements other than hydrogen and helium: Usually, when the calibration uncertainty of the energy standard reaches 3 eV, the attribution of the peak can be determined: This document is only applicable to

Analysis for this level of accuracy (for higher level of accuracy analysis can be found in ISO 17974):

The calibration method for the kinetic energy scale specified in this document uses reference materials such as pure copper and pure aluminium (or pure gold): because the flaw is accurate

The effect of the degree level is not obvious, so the test for instrument defects is not included in the document:

Traditionally, the kinetic energy of Auger electrons is referred to the vacuum level, and this reference value is still used by many analysts: However, the vacuum energy level is not easy to determine,

The same instrument will differ by more than 0:5eV: Although the use of vacuum levels as a reference generally does not lead to ambiguity of element attribution, it can lead to

Uncertainty of high-resolution measurements related to chemical states: Therefore, when designing Auger electron spectroscopy and X-ray photoelectron spectroscopy instruments, the kinetic energy is

The Fermi level is used as a reference, which is 4:5eV higher than that of the vacuum level: According to this document, users can freely choose the parameters suitable for their work:

Exam level:

Medium Resolution Auger Electron Spectrometer for Surface Chemical Analysis

Energy Scale Calibration for Elemental Analysis

1 Scope

This document specifies a calibration method for an Auger electron spectrometer kinetic energy scale with an uncertainty of 3 eV for the identification of surface conventional elements:

White: In addition, this document also specifies a method for determining the calibration period:

This document applies to instruments in direct mode or differential mode whose resolution is less than or equal to 0:5%, and the peak value of the modulation amplitude in differential mode is

2eV, equipped with an inert gas ion gun or other sample cleaning method, a spectrometer with an electron gun of 4keV or higher beam energy:

2 Normative references

The contents of the following documents constitute essential provisions of this document through normative references in the text: Among them, dated citations

documents, only the version corresponding to that date applies to this document; for undated references, the latest edition (including all amendments) applies to

this document:

ISO 18115 Surface chemical analysis- Vocabulary

Note: GB/T 22461-2008 Surface Chemical Analysis Vocabulary (ISO 18115:2001, IDT)

3 Terms and Definitions

Terms and definitions defined in ISO 18115 apply to this document:

4 Symbols and Abbreviations

The following symbols and abbreviations apply to this document:

AES Auger Electron Spectroscopy

a Measured energy scalar error

b Measured zero offset error, in electron volts (eV)

Ecorr Kinetic energy result after calibration of Emeas, in eV

Emeas Kinetic energy measured in eV

Emeas,n Kinetic energy measured for the nth peak in Table 1, in eV

Eref,n The kinetic energy reference value for the nth peak in Table 1, in eV

FWHM Half-height peak width, in eV

FWHM of the W peak

deltan offset energy, for n=1, 2, 3, 4 peaks (see Table 1), subtract the reference kinetic energy value from the average of the measured calibration peak kinetic energy

given in eV

Additional correction to Emeas after deltaEcorr calibration to provide corrected kinetic energy results

beta The energy scale scan rate of the simulated system in electron volts per second (eV/s)

tau Time constant of the analog detector electronics in seconds (s)