GB/T 28892-2024Surface chemical analysis - X-ray photoelectron spectroscopy - Description of selected instrumental performance parameters (English PDF)
表面化学分析 X射线光电子能谱 选择仪器性能参数的表述
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Issued by
State Administration for Market Regulation, China National Standardization Administration
Level / Type
National · Recommended
Issue date
March 15, 2024
Implementation date
July 1, 2024
Scope
GB/T 28892-2024 is the English-translated version of 表面化学分析 X射线光电子能谱 选择仪器性能参数的表述.
GB/T 28892-2024 — This document describes a method for expressing specific performance parameters of X-ray photoelectron spectrometers.
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Document preview — GB/T 28892-2024
National Standard of the People's Republic of China
- ICS
- 71.040.40
- Classification
- G 04
- Replacing
- GB/T 28892-2012
Issued by: State Administration for Market Regulation, China National Standardization Administration
Contents
- Preface
- Introduction
- 1 Scope
- 2 Normative references
- 3 Terms and Definitions
- 4 Abbreviations
- 5 Select the description of instrument performance parameters
- 5.1 Analytical methods
- 5.2 Sample
- 5.3 System Configuration
- 5.4 X-ray sources
- 5.5 Spectrometer Intensity Performance and Energy Resolution
- 5.6 Spectrometer Energy Scale
- 5.7 Spectrometer Intensity Linearity
- 5.8 Spectrometer response function
- 5.9 Imaging and Region Resolution
- 5.10 Charge Neutralization
- 5.11 Variable Angle XPS
- 5.12 Vacuum Environment
- References
Foreword
This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for standardization work Part 1: Structure and drafting rules for standardization documents" Drafting.
This document replaces GB/T 28892-2012 "Table of performance parameters for selected instruments for surface chemical analysis X-ray photoelectron spectroscopy" Compared with GB/T 28892-2012, in addition to structural adjustments and editorial changes, the main technical changes are as follows.
a) The terms and definitions have been changed (see Chapter 3, Chapter 3 of the 2012 edition);
b) Method 2 has been changed (see 5.9.3, 5.9.3 of the 2012 edition).
This document is equivalent to ISO 15470:2017 "Table of performance parameters for selected instruments for surface chemical analysis using X-ray photoelectron spectroscopy" "Statement".
Introduction
There are many manufacturers of X-ray photoelectron spectrometers around the world. Although the basic principle of XPS analysis method is the same for each instrument Although the specific design of instruments and the way in which their performance is described vary, it is often difficult to compare the performance of instruments produced by different manufacturers.
This document provides a basic list of items so that all X-ray photoelectron spectrometers can be described in a common way.
Manufacturer's instructions, which can be 30 pages long or more. This document is intended to make certain items identified in the manufacturer's instructions more specific.
Have consistent and clear meaning.
Surface chemical analysis X-ray photoelectron spectroscopy Select the statement of instrument performance parameters
1 Scope
This document describes a method for expressing specific performance parameters of X-ray photoelectron spectrometers.
2 Normative references
The contents of the following documents constitute the essential clauses of this document through normative references in this document.
For referenced documents without a date, only the version corresponding to that date applies to this document; for referenced documents without a date, the latest version (including all amendments) applies to this document.
Note. GB/T 22461.1-2023 Vocabulary for surface chemical analysis Part 1: General terms and spectral terms (ISO 18115-1:2013, IDT) GB/T 22461.2-2023 Vocabulary for surface chemical analysis Part 2: Terminology for scanning probe microscopy (ISO 18115-2:2021, MOD)
3 Terms and definitions
For the purpose of this document, the terms and definitions defined in ISO 18115 (all parts) apply.
4 Abbreviations
The following abbreviations apply to this document.
5 Select the description of instrument performance parameters
5.1 Analysis methods
The methods used to obtain information from the samples should be briefly described, and alternative analytical techniques should be described for the system under consideration.
5.2 Samples
The sample sizes and shapes that can be analyzed by the instrument under normal operation should be given.
If there are restrictions on sample size or shape (such as measurement of peripheral volume, etc.), they should be explained in detail.
5.3 System composition
The design geometry and tolerances of the important analysis components of the system should be described.
Example. Angle tolerance is often ±1°.
......
This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 7 pages — is available in the English PDF.
Referenced standards
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Related Standards
GB/T 22461.1-2023 — Surface chemical analysis - Vocabulary - Part 1: General terms and terms used in spectroscopy
GB/T 22461.2-2023 — Surface chemical analysis - Vocabulary - Part 2: Terms used in scanning probe microscopy
GB/T 9246-2026 — Microscopes - Oculars (eyepieces)
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