GB/T 28632-2012Surface chemical analysis -- Auger electron spectroscopy and X-ray photoelectron spectroscopy -- Determination of lateral resolution (English PDF)

3.1 Terms and Definitions

GB/T 22461-2008 defined and the following terms and definitions are applicable to this document.

3.1.1

Lateral resolution resolution, lateral

In the sample surface or a plane within the imaging plane at right angles to the optical axis can be trusted when the composition change region determined points tested distance.

Note 1. The selected plane should be described.

Note 2. In practice, the lateral resolution can be recognized as follows. Strength (i) on a very small sample of the emission points emit distribution half width (FWHM) or (i) along the sample

When the product signal and to distinguish between nature and contain well-defined part of a step function line scan, the intensity of between 12% and 88% points

The distance of the Gaussian intensity distribution, the two values \u200b\u200bare equal. To other distribution, the choice of the other parameters may be more appropriate. For stairs

The distance between the function of scan line spectrum often applied strength distance between 20% and 80% points or 16% and 84%, two points on the Gaussian distribution

Function, the latter pair of the 2sigma width.

GB/T 22461-2008, the definition 5.255

Note 3. For the purposes of this standard, the preferred plane measurement sample.

3.2 Symbols and abbreviations

AES --- Auger electron spectroscopy;

d --- is incident on the sample surface of the electron beam (axial symmetry) beam diameter;

FWHM --- the maximum height of the full width at half (the half-width);

XPS --- X-ray photoelectron spectroscopy;

chi --- lateral resolution required for the measurement parameter; lateral resolution of the measurement starts at the maximum signal strength chi%, at the end of the letter

Maximum signal strength (100-chi)% in deltar under (50) case, chi 25.;

The angle between the incident electron beam or X-ray beam and the surface normal between the upper surface theta --- samples.

GB/T 28632-2012/ISO 18516.2006