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GB/T 25915.2-2021Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration (English PDF)

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Issued by

SAMR; SAC

Level / Type

National · Recommended

Issue date

August 20, 2021

Implementation date

March 1, 2022

Scope

GB/T 25915.2-2021 (Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration) is available as an English-translated PDF.

GB/T 25915.2-2021 — This document specifies minimum requirements for a monitoring plan. This monitoring plan is for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration. This document applies to the monitoring of particle concentration of particle-size range

Document preview — GB/T 25915.2-2021

National Standard of the People's Republic of China

Issued by: SAMR; SAC

Contents

  • Foreword...3
  • Introduction...5
  • 1 Scope...8
  • 2 Normative references...8
  • 3 Terms and definitions...8
  • 4 Creating, implementing and maintaining a monitoring plan...9
  • 5 Periodic classification of air cleanliness by particle concentration...12
  • Annex A (Informative) Matters to consider when developing a monitoring plan...13
  • Annex B (Informative) Considerations for setting alert and action levels...17
  • Bibliography...23

Foreword

This document was drafted in accordance with the rules given in GB/T 1.1-2020,

Directives for standardization - Part 1: Rules for the structure and drafting of

standardizing documents.

This document is Part 2 of GB/T 25915, Cleanrooms and associated controlled

environments. The following parts have been issued for GB/T 25915:

-- Part 1: Classification of air cleanliness by particle concentration;

-- Part 2: Monitoring to provide evidence of cleanroom performance related to

air cleanliness by particle concentration;

-- Part 3: Test methods;

-- Part 4: Design, construction and start-up;

-- Part 5: Operations;

-- Part 6: Vocabulary;

-- Part 7: Separative devices (clean air hoods, gloveboxes, isolators and

minienvironments);

-- Part 8: Classification of air cleanliness by chemical concentration (ACC);

-- Part 9: Classification of surface cleanliness by particle concentration;

-- Part 10: Classification of surface cleanliness by chemical concentration;

-- Part 12: Specifications for monitoring of air cleanliness by nanoscale particle

concentration.

This document replaces GB/T 25915.2-2010, Cleanrooms and associated controlled

environments - Part 2: Specifications for testing and monitoring to prove continued

compliance with GB/T 25915.1. Compared with GB/T 25915.2-2010, the main

technical changes are as follows:

a) Modify the scope (see Chapter 1; Chapter 1 of the 2010 edition);

b) In terms and definitions, keep only the original two terms, test and monitoring;

delete the other six terms (see Chapter 3 of the 2010 edition); add two terms,

action level and alert level (see 3.3 and 3.4);

c) Change "Demonstration of maintaining the requirements" to "Creating,

implementing and maintaining a monitoring plan" (see Chapter 4; Chapter 4

of the 2010 edition);

Cleanrooms and associated controlled environments - Part

2: Monitoring to provide evidence of cleanroom

performance related to air cleanliness by particle

concentration

1 Scope

This document specifies minimum requirements for a monitoring plan. This monitoring

plan is for cleanroom or clean zone performance related to air cleanliness by particle

concentration, based upon parameters that measure or affect airborne particle

concentration.

This document applies to the monitoring of particle concentration of particle-size range

0.1 µm ~ 5 µm.

This document does not address condition monitoring of aspects such as vibration or

general maintenance of the engineering systems. Concentrations of ultrafine particles

(particles smaller than 0.1 µm) will be addressed in a separate standard.

2 Normative references

The following documents are referred to in the text in such a way that some or all of

their content constitutes requirements of this document. For dated references, only the

edition cited applies. For undated references, the latest edition of the referenced

document (including any amendments) applies.

GB/T 25915.1-2021, Cleanrooms and associated controlled environments - Part

1: Classification of air cleanliness by particle concentration (ISO 14644-1:2015,

MOD)

Note: There is no technical difference between the content cited in GB/T

25915.1-2021 and the content cited in ISO 14644-1:2015.

3 Terms and definitions

For the purposes of this document, the terms and definitions given in GB/T 25915.1-

2021 and the following apply:

3.1

......

......
This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — all pages — is available in the English PDF.

Referenced standards

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