GB/T 25915.13-2022Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications (English PDF)
洁净室及相关受控环境 第13部分：达到粒子和化学洁净度要求的表面清洁
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Issued by
State Administration for Market Regulation, China National Standardization Administration
Level / Type
National · Recommended
Issue date
December 30, 2022
Implementation date
July 1, 2023
Scope
GB/T 25915.13-2022 is the English-translated version of 洁净室及相关受控环境 第13部分：达到粒子和化学洁净度要求的表面清洁.
GB/T 25915.13-2022 is the Chinese standard "Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications".
Its scope clause reads: This document provides guidance on the cleaning of cleanroom surfaces, equipment surfaces and material surfaces to achieve the required cleanliness.
Surface references in this document and all surfaces (exterior, interior). This document provides Particle Concentration (SCP) and Surface Chemical Cleanliness (SCC) cleanliness for assessing Surface Cleanliness The required cleaning methods, and the cleaning techniques that should be considered to achieve the specified cleanliness.
ISO 14644.9 and ISO 14644.10 give the suitability rate and related detection methods of cleaning technology.
This document contains the following general guidelines. --- Surface target cleanliness level; --- Applicability of the cleaning method; --- Compatibility of the surface with the cleaning technology; --- Evaluation of the suitability of the cleaning method.
This document does not cover the following. --- Classification of cleaning methods; ---Products produced in clean rooms; --- Specific cleaning methods associated with specific surfaces; --- Detailed description of the cleaning mechanism, specific methods and procedures of various cleaning methods; --- Detailed description of material properties; --- Mechanism of surface damage by cleaning process and cleaning time; --- Adhesion between the pollutant and the surface, and the adhesion process usually related to time and process; ---Other characteristics of particles, such as static electricity, ions, etc.; ---Chemical reaction of molecular pollutants with surfaces; --- surface microorganisms; --- radioactive contamination; ---health and safety; ---Environmental factors, such as. waste disposal, discharge, etc.; --- Selection of statistical methods.
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Document preview — GB/T 25915.13-2022
National Standard of the People's Republic of China
- ICS
- 13.040.35
- Classification
- C 70
Issued by: State Administration for Market Regulation, China National Standardization Administration
Contents
- Preface
- Introduction
- 1 Scope
- 2 Normative references
- 3 Terms and Definitions
- 4 General method
- 5 Object description
- 6 Cleanliness requirements
- 7 Determination of initial pollution level
- 8 Other requirements
- 9 Choice of cleaning method
- 10 Material Compatibility Check
- 11 Cleaning Validation
- 12 Measurement method
- 13 records
- Appendix A (informative) Cleaning elements
- Appendix B (informative) Cleaning method
- Appendix C (informative) Compatibility of materials and cleaning agents
- Appendix D (informative) cleanliness measurement
1 Scope
This document provides guidance on the cleaning of cleanroom surfaces, equipment surfaces and material surfaces to achieve the required cleanliness. Surface references in this document and all surfaces (exterior, interior).
This document provides Particle Concentration (SCP) and Surface Chemical Cleanliness (SCC) cleanliness for assessing Surface Cleanliness
The required cleaning methods, and the cleaning techniques that should be considered to achieve the specified cleanliness.
ISO 14644.9 and ISO 14644.10 give the suitability rate and related detection methods of cleaning technology.
This document contains the following general guidelines.
--- Surface target cleanliness level;
--- Applicability of the cleaning method;
--- Compatibility of the surface with the cleaning technology;
--- Evaluation of the suitability of the cleaning method.
This document does not cover the following.
--- Classification of cleaning methods;
---Products produced in clean rooms;
--- Specific cleaning methods associated with specific surfaces;
--- Detailed description of the cleaning mechanism, specific methods and procedures of various cleaning methods;
--- Detailed description of material properties;
--- Mechanism of surface damage by cleaning process and cleaning time;
--- Adhesion between the pollutant and the surface, and the adhesion process usually related to time and process;
---Other characteristics of particles, such as static electricity, ions, etc.;
---Chemical reaction of molecular pollutants with surfaces;
--- surface microorganisms;
--- radioactive contamination;
---health and safety;
---Environmental factors, such as. waste disposal, discharge, etc.;
--- Selection of statistical methods.
2 Normative references
The contents of the following documents constitute the essential provisions of this document through normative references in the text. Among them, dated references
For documents, only the version corresponding to the date is applicable to this document; for undated reference documents, the latest version (including all amendments) is applicable to this document.
ISO 14644-8 Clean rooms and related controlled environments Part 8.Air cleanliness (ACC) classes by chemical concentration
GB/T 25915.14 | GB/T 25915.2 | GB/T 25915.1 | GB/T 25915.17 | GB/T 25915.16 | GB/T 25915.15 | […]
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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 51 pages — is available in the English PDF.
Referenced standards
Normative references
ISO 14644
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Related Standards
GB/T 25915.1-2021 — Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration
GB/T 25915.10-2021 — Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration
GB/T 25915.12-2021 — Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring of air cleanliness by nanoscale particle concentration
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