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GB/T 24579-2009Test method for measuring surface metal contamination of polycrystalline silicon by acid extraction-atomic absorption spectroscopy (English PDF)

酸浸取 原子吸收光谱法测定多晶硅表面金属污染物

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Issued by

Standardization Administration of China

Level / Type

National · Recommended

Issue date

October 30, 2009

Implementation date

June 1, 2010

Scope

GB/T 24579-2009 is the English-translated version of 酸浸取 原子吸收光谱法测定多晶硅表面金属污染物.

GB/T 24579-2009 — This standard specifies the use of acid leaching from the surface of the polycrystalline silicon pieces of metal impurities. And graphite furnace atomic absorption quantitative detection of trace metal impurities on the polysilicon block surface analysis methods.

This standard applies to the alkali metal, alkaline earth metal and the first series of transition elements such as sodium, zinc detection, Nickel, aluminum, iron, chromium.

This standard applies to all kinds of rods, blocks, grain, sheet-shaped multi- product or single crystal silicon surface to detect metal contaminants. Since the block, pieces or grains of irregular shape.

Area is difficult to accurately determine. Calculated according to the sample weight. Weight of the sample used is 50g ~ 300g, LOD tied to 0.

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Document preview — GB/T 24579-2009

National Standard of the People's Republic of China

ICS
29.045
Classification
H 80

Issued by: Standardization Administration of China

Contents

  • What this standard covers1
  • Document data2
  • Standards quoted by this document3

What this standard covers

This standard specifies the use of acid leaching from the surface of the polycrystalline silicon pieces of metal impurities. And graphite furnace atomic absorption quantitative detection of trace metal impurities on the polysilicon block surface analysis methods. This standard applies to the alkali metal, alkaline earth metal and the first series of transition elements such as sodium, zinc detection, Nickel, aluminum, iron, chromium. This standard applies to all kinds of rods, blocks, grain, sheet-shaped multi- product or single crystal silicon surface to detect metal contaminants. Since the block, pieces or grains of irregular shape. Area is difficult to accurately determine. Calculated according to the sample weight. Weight of the sample used is 50g ~ 300g, LOD tied to 0. 01ng/g.

Document data

International classification (ICS): 29.045.

Chinese classification (CCS): H80.

Estimated length of the Chinese original: 12,160 words.

Adopted international standard: SEMI MF1724-1104, MOD.

Standards quoted by this document

GB/T 11446.1; ISO 14644-1

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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 8 pages — is available in the English PDF.

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