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GB/T 20726-2015Microbeam analysis -- Selected instrumental performance parameters for the specification and checking of energy dispersive X-ray spectrometers for use in electron probe microanalysis (English PDF)

微束分析电子探针显微分析X射线能谱仪主要性能参数及核查方法

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Issued by

General Administration of Quality Supervision, Inspection and Quarantine

Level / Type

National · Recommended

Issue date

October 9, 2015

Implementation date

September 1, 2016

Scope

GB/T 20726-2015 is the English-translated version of 微束分析电子探针显微分析X射线能谱仪主要性能参数及核查方法.

GB/T 20726-2015 is the Chinese standard "Microbeam analysis -- Selected instrumental performance parameters for the specification and checking of energy dispersive X-ray spectrometers for use in electron probe microanalysis".

Its scope clause reads: This Standard defines the most important quantities that characterize an energy-dispersive X-ray spectrometer consisting of a semiconductor detector, a pre-amplifier and a signal-processing unit as the essential parts.

This Standard is only applicable to spectrometers with semiconductor detectors operating on the principle of solid-state ionization.

This Standard specifies minimum requirements and how relevant instrumental performance parameters are to be checked for such spectrometers attached to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA).

The procedure used for the actual analysis is outlined in ISO 22309[2] and ASTM E1508[3] and is outside the scope of this Standard. Its clauses include terms and definitions.

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Document preview — GB/T 20726-2015

National Standard of the People's Republic of China

ICS: 71.040.99
Classification: G 04

Issued by: General Administration of Quality Supervision, Inspection and Quarantine

Foreword3
Introduction4
1 Scope5
2 Normative references5
3 Terms and definitions5
4 Requirements8
5 Check of further performance parameters10
energy resolution of the spectrometer11
dependence of the instrumental detection efficiency16
Bibliography19

1 Scope

This Standard defines the most important quantities that characterize an energy-dispersive X-ray spectrometer consisting of a semiconductor detector, a pre-amplifier and a signal-processing unit as the essential parts. This

Standard is only applicable to spectrometers with semiconductor detectors operating on the principle of solid-state ionization. This Standard specifies minimum requirements and how relevant instrumental performance parameters are to be checked for such spectrometers attached to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA). The procedure used for the actual analysis is outlined in ISO 22309[2] and ASTM E1508[3] and is outside the scope of this Standard.

2 Normative references

The following referenced documents are indispensable for the application of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies.

ISO 23833 Microbeam analysis - Electron probe microanalysis (EPMA) -

Vocabulary

3 Terms and definitions

For the purposes of this Standard, the terms and definitions given in ISO 23833 and the following apply.

NOTE With the exception of 3.1, 3.2, 3.2.1, 3.2.2, 3.11, 3.12 and 3.13, these definitions are given in the same or analogous form in ISO 22309[2], ISO 18115-1[4] and ISO 23833.

3.1 energy-dispersive X-ray spectrometer

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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 10 pages — is available in the English PDF.

Referenced standards

Normative references

ISO 23833

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