YS/T 986-2014Specification for serial alphanumeric marking of the front surface of wafers (English PDF)
晶片正面系列字母数字标志规范
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Issued by
Ministry of Industry and Information Technology
Level / Type
National · Recommended
Issue date
October 14, 2014
Implementation date
April 1, 2015
Scope
YS/T 986-2014 is the English-translated version of 晶片正面系列字母数字标志规范.
YS/T 986-2014 — 1.1 standard specifies the silicon or other semiconductor wafer string of consecutive letters and numbers mark. The ID tag and associated Information is stored into the database, for each wafer and played a silicon wafer during device manufacturing traceability and control purposes.
1.2 This standard defines the basic provisions of the wafer mark coding. Without processing a wafer, using a simple automated optical character recognition device can to mark the independent and rapid manual identification, to ensure that the silicon wafer manufacturer marked consistency, help monitor wafer process Variety.
1.3 This standard applies to a wide range of wafer products, such as epitaxial wafers, SOI sheet, polished and so on.
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Document preview — YS/T 986-2014
National Standard of the People's Republic of China
- ICS
- 29.045
- Classification
- H 80
Issued by: Ministry of Industry and Information Technology
Contents
- What this standard covers1
- Document data2
- Standards quoted by this document3
What this standard covers
This Standard specifies the marker geometry and spatial position include alphanumeric, especially for the reference plane and with a band gap of silicon polished. This Standard does not involve the production of marker technology.
Document data
International classification (ICS): 29.045.
Chinese classification (CCS): H80.
Estimated length of the Chinese original: 12,169 words.
Adopted international standard: SEMI M12-0706, IDT.
Standards quoted by this document
SEMI M13; SEMI AUX001; SEIM AUX015
......
This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 8 pages — is available in the English PDF.
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