YS/T 937-2025Nickel-platinum target (English PDF)
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Issued by
Ministry of Industry and Information Technology
Level / Type
National · Recommended
Issue date
December 17, 2025
Implementation date
July 1, 2026
Scope
YS/T 937-2025 (Nickel-platinum target) is available as an English-translated PDF.
YS/T 937-2025 — This standard specifies the classification, technical requirements, test methods, inspection rules, marking, packaging, transportation, storage, and accompanying documents and order form contents for nickel-platinum sputtering targets.
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Document preview — YS/T 937-2025
National Standard of the People's Republic of China
- ICS
- 77.150.99
- Classification
- H 68
- Replacing
- YS/T 937-2013
Issued by: Ministry of Industry and Information Technology
Contents
- What this standard covers1
- Document data2
What this standard covers
This standard specifies the classification, technical requirements, test methods, inspection rules, marking, packaging, transportation, storage, and accompanying documents and order form contents for nickel-platinum sputtering targets. This standard applies to various nickel-platinum sputtering target products used in the preparation of semiconductor thin films.
Document data
International classification (ICS): 77.150.99.
Chinese classification (CCS): H68.
Supersedes the earlier edition YS/T 937-2013.
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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — all pages — is available in the English PDF.
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