YS/T 936-2013Sputtering nickel vanadium alloy target used in integrated circuit device (English PDF)
集成电路器件用镍钒合金靶材
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Issued by
Ministry of Industry and Information Technology
Level / Type
National · Recommended
Issue date
October 17, 2013
Implementation date
March 1, 2014
Scope
YS/T 936-2013 is the English-translated version of 集成电路器件用镍钒合金靶材.
YS/T 936-2013 — This standard specifies the integrated circuit device with a nickel-vanadium alloy sputtering targets requirements, test methods, inspection rules and signs, packaging, transportation, Storage, quality certificate and a contract or purchase order content.
This standard applies to all types of nickel-vanadium alloy sputtering targets used in the manufacture of electronic film.
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Document preview — YS/T 936-2013
National Standard of the People's Republic of China
- ICS
- 77.150.40
- Classification
- H 62
Issued by: Ministry of Industry and Information Technology
Contents
- What this standard covers1
- Document data2
- Standards quoted by this document3
What this standard covers
This standard specifies: integrated circuit device with a nickel vanadium alloy sputtering targets requirements, test methods, inspection rules and signs, packaging, transportation, storage, quality certificate and the contract or purchase order content.
Document data
International classification (ICS): 77.150.40.
Chinese classification (CCS): H62.
Estimated length of the Chinese original: 16,162 words.
Standards quoted by this document
GB/T 1031; GB/T 6394; GB/T 14265; GJB 1580A; YS/T 837
......
This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 11 pages — is available in the English PDF.
Referenced standards
Normative references
- GB/T 1031Geometrical product specifications(GPS) - Surface texture: Profile method - Surface roughness parameters and their values
- GB/T 6394Determination of estimating the average grain size of metal
- GB/T 14265General rule of chemical analysis for hydrogen,oxygen,nitrogen,carbon and sulfur in metallic materials
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Related Standards
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