YS/T 1601-2023Determination of impurity content in hexachlorodisilane - Inductively coupled plasma mass spectrometry (English PDF)
六氯乙硅烷中杂质含量的测定 电感耦合等离子体质谱法
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Issued by
Ministry of Industry and Information Technology
Level / Type
National · Recommended
Issue date
April 21, 2023
Implementation date
November 1, 2023
Scope
YS/T 1601-2023 is the English-translated version of 六氯乙硅烷中杂质含量的测定 电感耦合等离子体质谱法.
YS/T 1601-2023 — This standard specifies sodium, magnesium, aluminum, potassium, calcium, titanium, vanadium, chromium, manganese, iron, cobalt, nickel, copper, zinc, gallium, arsenic, lead, barium, lithium, strontium, and bismuth in hexachlorodisilane , molybdenum and other elements by inductively coupled plasma mass spectrometry.
This standard is applicable to the determination of the content of impurity elements in hexachlorodisilane.
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Document preview — YS/T 1601-2023
National Standard of the People's Republic of China
- ICS
- 77.04
- Classification
- H 17
Issued by: Ministry of Industry and Information Technology
Contents
- What this standard covers1
- Document data2
What this standard covers
This standard specifies sodium, magnesium, aluminum, potassium, calcium, titanium, vanadium, chromium, manganese, iron, cobalt, nickel, copper, zinc, gallium, arsenic, lead, barium, lithium, strontium, and bismuth in hexachlorodisilane , molybdenum and other elements by inductively coupled plasma mass spectrometry. This standard is applicable to the determination of the content of impurity elements in hexachlorodisilane. The measurement range of each element is 0.01ng/g~50ng/g.
Document data
International classification (ICS): 77.04.
Chinese classification (CCS): H17.
Estimated length of the Chinese original: 8,890 words.
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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 6 pages — is available in the English PDF.
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