YS/T 1164-2016Test method for the content of impurities in high purity quartz used for silicon material. Inductively coupled plasma atomic emission spectrometry method (English PDF)

YS/T 1164-2016 is the English-translated version of 硅材料用高纯石英制品中杂质含量的测定 电感耦合等离子体发射光谱法.

YS/T 1164-2016 — This standard specifies the determination method of aluminum, calcium, potassium, sodium, copper, magnesium, phosphorus, arsenic, zinc, nickel and boron in high purity quartz products for polysilicon.

This standard is applicable to the determination of aluminum, calcium, potassium, sodium, copper, magnesium, phosphorus, arsenic, zinc, nickel and boron in high purity quartz products for polysilicon.

See Table 1. Table 1 Measurement range Element mass fraction/(µg/g) Element mass fraction/(µg/g) Aluminum 1.00~50.00 Phosphorus 0.10~10.00 Calcium 1.00~50.00 Arsenic 0.10~10.00 Potassium 0.10~50.00 Zinc 0.10~10.00 Sodium 1.00~50.00 Nickel 0.10~10.00 Copper 0.10~5.00 Boron 0.10~10.00 Magnesium 1.00~5.00 - -

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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 4 pages — is available in the English PDF.

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