YS/T 1068-2015Ruthenium powder for ruthenium sputttering target (English PDF)
制备钌靶用钌粉
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Issued by
Ministry of Industry and Information Technology
Level / Type
National · Recommended
Issue date
April 30, 2015
Implementation date
October 1, 2015
Scope
YS/T 1068-2015 is the English-translated version of 制备钌靶用钌粉.
YS/T 1068-2015 — This standard specifies the requirements for the hard disk and integrated circuit industries ruthenium sputtering target with ruthenium powder, test methods, inspection rules and signs, packaging, Transportation, storage, quality certificate and contract (or purchase order) content.
This standard applies to the preparation of the hard drive and integrated circuit industries ruthenium sputtering target ruthenium powder (hereinafter referred to as ruthenium powder).
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Document preview — YS/T 1068-2015
National Standard of the People's Republic of China
- ICS
- 77.150.99
- Classification
- H 68
Issued by: Ministry of Industry and Information Technology
Contents
- What this standard covers1
- Document data2
- Standards quoted by this document3
What this standard covers
This Standard specifies the requirements for the hard disk and integrated circuit industries ruthenium sputtering target with ruthenium powder, test methods, inspection rules and signs, packaging, transportation, storage, quality certificate and contract (or purchase order) content. This Standard applies to the preparation of the hard drive and integrated circuit industries ruthenium sputtering target ruthenium powder (hereinafter referred to as ruthenium powder).
Document data
International classification (ICS): 77.150.99.
Chinese classification (CCS): H68.
Estimated length of the Chinese original: 6,628 words.
Standards quoted by this document
GB/T 5162; GB/T 6524; GB/T 23275; HB 5220.3; HB 5220.49
......
This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 4 pages — is available in the English PDF.
Referenced standards
Normative references
- GB/T 5162Metallic powders - Determination of tap density
- GB/T 6524Metallic powders -- Determination of particle size distribution by gravitational sedimentation in a liquid and attenuation measurement
- GB/T 23275Methods for chemical analysis of ruthenium determination of lead, iron, nickel, aluminum, copper, silver, gold, platinum, palladium, rhodium, iridium and silicon in ruthenium powder by glow discharge mass spectrometry
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Related Standards
GB/T 23275-2009 — Methods for chemical analysis of ruthenium determination of lead, iron, nickel, aluminum, copper, silver, gold, platinum, palladium, rhodium, iridium and silicon in ruthenium powder by glow discharge mass spectrometry
GB/T 5162-2021 — Metallic powders - Determination of tap density
GB/T 6524-2003 — Metallic powders -- Determination of particle size distribution by gravitational sedimentation in a liquid and attenuation measurement
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YS/T 1068-2015
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