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YS/T 1031-2025Chemical vapor deposition furnace (English PDF)

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Issued by

Ministry of Industry and Information Technology

Level / Type

National · Recommended

Issue date

August 19, 2025

Implementation date

March 1, 2026

Scope

YS/T 1031-2025 (Chemical vapor deposition furnace) is available as an English-translated PDF.

YS/T 1031-2025 — This standard specifies the structural type and composition, technical requirements, test methods, inspection rules and technical classification, marking, packaging, transportation, storage, and accompanying documentation and order forms for chemical vapor deposition furnaces.

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Document preview — YS/T 1031-2025

National Standard of the People's Republic of China

ICS: 77.18
Classification: H 91
Replacing: YS/T 1031-2015

Issued by: Ministry of Industry and Information Technology

What this standard covers1
Document data2

What this standard covers

This standard specifies the structural type and composition, technical requirements, test methods, inspection rules and technical classification, marking, packaging, transportation, storage, and accompanying documentation and order forms for chemical vapor deposition furnaces. This standard applies to chemical vapor deposition furnaces used in the preparation of metals and metal alloys, metal composites, carbon and silicon carbide materials, and inorganic materials.

Document data

International classification (ICS): 77.18.

Chinese classification (CCS): H91.

Estimated length of the Chinese original: 10,141 words.

Supersedes the earlier edition YS/T 1031-2015.

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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 7 pages — is available in the English PDF.

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