YS/T 1024-2015Tantalum sputtering targets (English PDF)
溅射用钽靶材
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Issued by
Ministry of Industry and Information Technology
Level / Type
National · Recommended
Issue date
April 30, 2015
Implementation date
October 1, 2015
Scope
YS/T 1024-2015 is the English-translated version of 溅射用钽靶材.
YS/T 1024-2015 — This standard specifies for the preparation of thin films of tantalum sputtering target material requirements, test methods, inspection rules and signs, packaging, transportation, storage, Quality certificate and purchase order (or contract) content.
This standard applies to vacuum electron beam melting high purity tantalum ingots as raw material by plastic working, heat treatment, machining, welding, etc. Producing a sputtering target of tantalum (Ta target hereinafter).
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Document preview — YS/T 1024-2015
National Standard of the People's Republic of China
- ICS
- 77.150.99
- Classification
- H 63
Issued by: Ministry of Industry and Information Technology
Contents
- What this standard covers1
- Document data2
- Standards quoted by this document3
What this standard covers
This Standard specifies for the preparation of thin films of tantalum sputtering target material requirements, test methods, inspection rules and signs, packaging, transportation, storage, quality certificate and purchase order (or contract) content. This Standard applies to vacuum electron beam melting high purity tantalum ingots as raw materials produced by plastic working, heat treatment, machining, welding methods such as tantalum sputtering target (hereinafter referred to as the tantalum target).
Document data
International classification (ICS): 77.150.99.
Chinese classification (CCS): H63.
Estimated length of the Chinese original: 9,934 words.
Standards quoted by this document
GB/T 1804; GB/T 4340.1; GB/T 6394; GB/T 8651; GB/T 15076.8; GB/T 15076.13; GB/T 15076.14; GB/T 15076.15; GB/T 20967-2007; YS/T 837; YS/T 899
......
This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 7 pages — is available in the English PDF.
Referenced standards
Normative references
- GB/T 1804General tolerances - Tolerances for linear and angular dimensions without individual tolerance indications
- GB/T 4340.1Metallic materials - Vickers hardness test - Part 1: Test method
- GB/T 6394Determination of estimating the average grain size of metal
- GB/T 8651Metal plates—Flaw detection method by the ultrasonic plate wave
- GB/T 15076.8Methods for chemical analysis of tantalum and niobium - Determination of carbon and sulphur contents
- GB/T 15076.13Methods for chemical analysis of tantalum and niobium - Part 13: Determination of nitrogen content - Inert gas fusion thermal conductivity method
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Related Standards
GB/T 15076.13-2017 — Methods for chemical analysis of tantalum and niobium - Part 13: Determination of nitrogen content - Inert gas fusion thermal conductivity method
GB/T 15076.14-2008 — Methods for chemical analysis of tantalum and niobium - Determination of oxygen content
GB/T 15076.14-2026 — Methods for chemical analysis of tantalum and niobium — Part 14: Determination of oxygen and nitrogen contents — Pulse infrared absorption and thermal conductivity method
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YS/T 1024-2015
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