XB/T 530-2026High purity lanthanum metal target (English PDF)

XB/T 530-2026 is the English-translated version of 高纯金属镧靶材.

XB/T 530-2026 specifies high purity metal lanthanum targets. The document covers classification and designations, technical requirements, test methods, inspection rules, marking, packaging, transport, storage and accompanying documents. It applies to high purity metal lanthanum targets used in the semiconductor, optoelectronic and similar industries. A target is a block of material that is used as the source in thin film deposition.

The standard will be used by producers of rare earth metals and sputtering targets, by semiconductor and optoelectronic manufacturers that buy them, by test laboratories and inspection bodies, and by purchasers who need a technical basis for supply contracts. It is voluntary, as the /T in its code shows, and applies where a contract or another rule refers to it. The Ministry of Industry and Information Technology approved and issued it on 15 July 2026, and it takes effect on 1 February 2027. It is a new document and does not replace an earlier edition.

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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 15 pages — is available in the English PDF.

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