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SJ/Z 2926-1988Test methods for properties of mask-making equipment for manufacturing of ICs (English PDF)

集成电路制版设备性能测试方法

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Issued by

General Administration of Quality Supervision, Inspection and Quarantine of PRC

Level / Type

National · Recommended

Issue date

March 10, 1988

Implementation date

October 1, 1988

Scope

SJ/Z 2926-1988 is the English-translated version of 集成电路制版设备性能测试方法.

SJ/Z 2926-1988 — This standard applies to automatic engraved (painted) Figure machine, pattern generator, minified camera optical lithography equipment three main performance test method.

Technical performance testing aims to check whether the equipment or the use of the original design requirements.

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Document preview — SJ/Z 2926-1988

National Standard of the People's Republic of China

Classification: L 99

What this standard covers1
Document data2

What this standard covers

This standard applies to automatic engraved (painted) Figure machine, pattern generator, minified camera optical lithography equipment three main performance test method. Technical performance testing aims to check whether the equipment or the use of the original design requirements. Performance test methods specified in this standard does not, in all types of equipment and technology should file separately.

Document data

Chinese classification (CCS): L99.

Estimated length of the Chinese original: 19,155 words.

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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 13 pages — is available in the English PDF.

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