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HG/T 5895-2022Mixed gases for industrial use - Silane in nitrogen (English PDF)

工业用混合气体 硅烷/氮气

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Issued by

MIIT

Level / Type

Industry · Recommended

Issue date

October 20, 2022

Implementation date

April 1, 2023

Scope

HG/T 5895-2022 is the English-translated version of 工业用混合气体 硅烷/氮气.

The industrial mixture of silane in nitrogen is the subject of HG/T 5895-2022, a recommended Chinese chemical industry standard. It gives the method of preparing the mixture and the method of testing it, lays down inspection rules, and states the technical requirements together with marking, packaging, storage and safety information requirements. The standard applies to mixed gas prepared from silane and from high purity or ultra pure nitrogen of the grade used in the electronics industry. It was issued by the Ministry of Industry and Information Technology on 30 September 2022 and came into force on 1 April 2023.

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Document preview — HG/T 5895-2022

National Standard of the People's Republic of China

Issued by: Ministry of Industry and Information Technology of the People's Republic of China

Contents

  • 1 Scope

1 Scope

This standard specifies the preparation method and test method of nitrogen-silane mixed gas for industrial use, stipulates the inspection rules, and specifies the technical requirements, marking, packaging, storage and safety information requirements of the mixed gas. This standard applies to the mixed gas prepared from silane and high-purity nitrogen (or ultra-pure nitrogen) used in the electronics industry as raw materials.

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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 15 pages — is available in the English PDF.

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HG/T 5895-2022

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