GB/T 29024.4-2017Determination of particle size distribution -- Single particle light interaction methods -- Part 4: Light scattering airborne particle counter for clean spaces (English PDF)

Foreword

GB/T 29024 "Particle size analysis of single optical measurement method" is divided into four parts.

--- Part 1: Light scattering aerosol spectrometer;

--- Part 2: Liquid particle counter light scattering method;

--- Part 3: Liquid particle counter photolithography;

--- Part 4: Clean room light scattering dust particle counter.

This section GB/T 29024 Part 4.

This section drafted in accordance with GB/T 1.1-2009 given rules.

This section uses the translation method is equivalent to using ISO 21501-4:2007 "Particle size analysis of optical measurement methods Part 4: Jie Net interspersed light scattering particle counter ".

This section made the following editorial changes.

--- In keeping with the provisions of Chapter 3, replace "sampling volume" in the first column with "response capacity".

Introduction

In the electronics industry, the pharmaceutical industry, precision instruments manufacturing and medical clinics, and many other areas need to monitor particle pollution, and dust particle meter The counter is an effective instrument for monitoring particulate contamination in the air. This section provides a calibration procedure and test for light-scattering dust particle counters Card method to minimize errors in instrument measurements and differences in measurement results between different instruments.

1 Scope

GB/T 29024 provisions of this part of the clean room light scattering particle counter dust (abbreviated as LSAPC, hereinafter referred to as the count ) Calibration and verification methods, the instrument used to measure the size of particles suspended in the air and the number of concentrations. Light scattering method in this section For single particle measurement, the typical particle size measurement of this method is in the range of 0.1 µm to 10 µm.

In line with this section of the instrument is mainly used for clean rooms and controlled cleanliness of the classification of air cleanliness, see reference [2], but also For other ambient air particles and particle size distribution measurement.

This section contains the following.

--- Particle size calibration;

--- particle size set value verification;

--- Counting efficiency;

--- Particle size resolution;

--- Fake count rate;

--- maximum particle concentration;

--- Sampling flow;

--- sampling time;

--- Responsiveness;

--- Calibration cycle;

---testing report.

2 Terms and definitions

The following terms and definitions apply to this document.