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GB/T 17864-1999CD Metrology procedures (English PDF)

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Issued by

State Quality and Technical Supervision

Level / Type

National · Recommended

Issue date

September 13, 1999

Implementation date

June 1, 2000

Scope

GB/T 17864-1999 (CD Metrology procedures) is available as an English-translated PDF.

GB/T 17864-1999 — CD Metrology procedures

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Document preview — GB/T 17864-1999

National Standard of the People's Republic of China

ICS: 31.2
Classification: L 56

Issued by: State Quality and Technical Supervision

What this standard covers1
Document data2
Standards quoted by this document3

What this standard covers

This standard specifies the method of measurement systems for unified lithography process measurement accuracy CD image size.

Document data

International classification (ICS): 31.2.

Chinese classification (CCS): L56.

Estimated length of the Chinese original: 7,771 words.

Adopted international standard: SEMI P24-1994, IDT.

Standards quoted by this document

GB/T 16878-1997; GB/T 16879-1997

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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 5 pages — is available in the English PDF.

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