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GB/T 16880-1997Guidelines for photomask defect classification and size definition (English PDF)

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Issued by

State Bureau of Technical Supervision

Level / Type

National · Recommended

Issue date

June 20, 1997

Implementation date

March 1, 1998

Scope

GB/T 16880-1997 (Guidelines for photomask defect classification and size definition) is available as an English-translated PDF.

GB/T 16880-1997 — Guidelines for photomask defect classification and size definition

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Document preview — GB/T 16880-1997

National Standard of the People's Republic of China

ICS: 31.02
Classification: L 97

Issued by: State Bureau of Technical Supervision

Document data1

Document data

International classification (ICS): 31.02.

Chinese classification (CCS): L97.

Estimated length of the Chinese original: 4,426 words.

Adopted international standard: SEMI P22-1993, IDT.

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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 3 pages — is available in the English PDF.

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