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GB/T 16878-1997Specification for metrology pattern cells for integrated circuit manufacture (English PDF)

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Issued by

State Bureau of Technical Supervision

Level / Type

National · Recommended

Issue date

June 20, 1997

Implementation date

March 1, 1998

Scope

GB/T 16878-1997 (Specification for metrology pattern cells for integrated circuit manufacture) is available as an English-translated PDF.

GB/T 16878-1997 — This standard specifies several standard test patterns for micro graphics device used in the production of integrated circuits, measurement instruments and processes consistent with the comprehensive assessment and testing.

The standard width for the needs of metrology, resolution test and proximity effects testing requirements for certain types of test patterns shape the basic unit, the general size, and the recommended layout and design rules.

These include standard graphics available optical microscopy, electron microscopy and electron microprobe measurements with various graphic elements.

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Document preview — GB/T 16878-1997

National Standard of the People's Republic of China

ICS: 31.02
Classification: L 97

Issued by: State Bureau of Technical Supervision

What this standard covers1
Document data2

What this standard covers

This standard specifies several standard test patterns for micro graphics device used in the production of integrated circuits, measurement instruments and processes consistent with the comprehensive assessment and testing. The standard width for the needs of metrology, resolution test and proximity effects testing requirements for certain types of test patterns shape the basic unit, the general size, and the recommended layout and design rules. These include standard graphics available optical microscopy, electron microscopy and electron microprobe measurements with various graphic elements. This standard does not specify the measurement techniques to verify the size of the master key test pattern, nor specify how to measure the resist pattern on the wafer, the only requirements for certain kinds of necessary basic test pattern, and the user's actual implementation in line with the standard test pattern.

Document data

International classification (ICS): 31.02.

Chinese classification (CCS): L97.

Estimated length of the Chinese original: 11,185 words.

Adopted international standard: SMEI P19-1992, IDT.

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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 7 pages — is available in the English PDF.

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