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GB/T 16524-1996Specification for registration marks for photomasks (English PDF)

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Issued by

State Bureau of Technical Supervision

Level / Type

National · Recommended

Issue date

September 9, 1996

Implementation date

May 1, 1997

Scope

GB/T 16524-1996 (Specification for registration marks for photomasks) is available as an English-translated PDF.

GB/T 16524-1996 — Specification for registration marks for photomasks

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Document preview — GB/T 16524-1996

National Standard of the People's Republic of China

ICS: 31.2
Classification: L 55

Issued by: State Bureau of Technical Supervision

What this standard covers1
Document data2
Standards quoted by this document3

What this standard covers

This standard specifies the shape, size range and general location of all the alignment marks used on the photomask. This standard applies to the photomask.

Document data

International classification (ICS): 31.2.

Chinese classification (CCS): L55.

Estimated length of the Chinese original: 4,497 words.

Adopted international standard: SEMI P6-1988, MOD.

Standards quoted by this document

SJ/T 10152-1991; SJ/T 10584-1994

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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 3 pages — is available in the English PDF.

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